Lin Lin Zhang

US Patent:

6413871, Jul 2, 2002

Filed:

Jun 22, 1999

Appl. No.:

09/337983

Inventors:

Hichem MSaad - Santa Clara CA
Derek R. Witty - Fremont CA
Manoj Vellaikal - Santa Clara CA
Lin Zhang - San Jose CA
Yaxin Wang - Fremont CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

H01L 213105

US Classification:

438692, 117569, 117574, 117579, 438690, 438691, 438694, 438759, 438761, 438762, 438763, 438784

Abstract:

A film of fluorine-doped silicon glass (âFSGâ) is exposed to a nitrogen-containing plasma to nitride a portion of the FSG film. In one embodiment, the FSG film is chemically-mechanically polished prior to nitriding. The nitriding process is believed to scavenge moisture and free fluorine from the FSG film. The plasma can heat the FSG film to about 400Â C. for about one minute to incorporate about 0. 4 atomic percent nitrogen to a depth of nearly a micron. Thus, the nitriding process can passivate the FSG film deeper than a via depth.

US Patent:

6890597, May 10, 2005

Filed:

May 9, 2003

Appl. No.:

10/435296

Inventors:

Padmanabhan Krishnaraj - San Francisco CA, US
Bruno Geoffrion - San Jose CA, US
Michael S. Cox - Davenport CA, US
Lin Zhang - San Jose CA, US
Bikram Kapoor - Santa Clara CA, US
Anchuan Wang - Fremont CA, US
Zhenjiang Cui - San Jose CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C016/40

US Classification:

4272481, 42725537, 427355, 438692, 438697, 438788

Abstract:

A combination of deposition and polishing steps are used to permit improved uniformity of a film after the combination of steps. Both the deposition and polishing are performed with processes that vary across the substrate. The combination of the varying deposition and etching rates results in a film that is substantially planar after the film has been polished. In some instances, it may be easier to control the variation of one of the two processes than the other so that the more controllable process is tailored to accommodate nonuniformities introduced by the less controllable process.

US Patent:

6908862, Jun 21, 2005

Filed:

May 3, 2002

Appl. No.:

10/138189

Inventors:

Dongqing Li - Santa Clara CA, US
Xiaolin C. Chen - San Jose CA, US
Lin Zhang - San Jose CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

H01L021/311

US Classification:

438700, 438666, 438667, 438668, 438672, 438673, 438978, 216 39

Abstract:

A method of depositing a film on a substrate disposed in a substrate processing chamber. The method includes depositing a first portion of the film by forming a high density plasma from a first gaseous mixture flown into the process chamber. The deposition processes is then stopped and part of the deposited first portion of the film is etched by flowing a halogen etchant into the processing chamber. Next, the surface of the etched film is passivated by flowing a passivation gas into the processing chamber, and then a second portion of the film is deposited over the first portion by forming a high density plasma from a second gaseous mixture flown into the process chamber. In one embodiment the passivation gas consists of an oxygen source with our without an inert gas.

US Patent:

6929403, Aug 16, 2005

Filed:

Feb 10, 2003

Appl. No.:

10/364685

Inventors:

German Arciniegas - Fremont CA, US
Lin Zhang - Fremont CA, US

Assignee:

Opnext, Inc. - Fremont CA

International Classification:

G02B006/38
H01R013/627

US Classification:

385 55, 439352

Abstract:

An optical module having a latching mechanism to allow the module to be latched to a cage of a host system is disclosed. The latching mechanism includes a latch boss that can be engaged by a latch attached to the host cage to capture the module. The latching mechanism also includes a latch key that slides towards the latch boss to disengage the latch from the latch boss. The latch key is moved by a bail that rotates and exerts a force on the latch key by a cam surface.

US Patent:

7306473, Dec 11, 2007

Filed:

May 31, 2005

Appl. No.:

11/142016

Inventors:

Frank David Yashar - Sunnyvale CA, US
John P. Wai - Los Altos CA, US
Lin Zhang - Fremont CA, US

Assignee:

Opnext, Inc. - Eatontown NJ

International Classification:

H01R 13/627

US Classification:

439352, 439372

Abstract:

The present invention provides a three cam bail latch system and a method for disconnecting an electronic component from a port using the three cam bail latch system.

US Patent:

8428773, Apr 23, 2013

Filed:

Feb 12, 2009

Appl. No.:

12/370346

Inventors:

J. Scott Carr - Redwood City CA, US
Elliott Grant - Redwood City CA, US
Kevin Ma - San Jose CA, US
Jeff Roughgarden - Redwood City CA, US
Lin Zhang - Mountain View CA, US
Matthew Self - Emerald Hills CA, US

Assignee:

YottaMark, Inc. - Redwood City CA

International Classification:

G06K 7/10

US Classification:

700230, 702 19, 426392

Abstract:

Clamshells for packaging produce, or other unit packaging, are labeled with unique codes. Harvest crates for transporting filled clamshells from the harvest, or other containers for transporting unit packaging, are also labeled with unique codes. A plurality of labeled un-filled clamshells are nested together and placed into each harvest crate before the harvest, and the codes from the clamshells and the harvest crate are stored in association. In some instances, clamshells are de-nested, labeled with pre-printed labels, and nested again before being placed into the harvest crates. At the harvest the clamshells are removed from the harvest crate, de-nested, filled with produce, packed back into the harvest crate, and moved into the distribution chain. The unique codes are further associated with other information such as harvest data.

US Patent:

20090065568, Mar 12, 2009

Filed:

Mar 25, 2008

Appl. No.:

12/054654

Inventors:

Elliott Grant - Redwood City CA, US
J. Scott Carr - Los Gatos CA, US
Kevin Ma - San Jose CA, US
Lin Zhang - Mountain View CA, US
Jeff Roughgarden - Redwood City CA, US

International Classification:

G06F 17/00

US Classification:

235375

Abstract:

Methods are provided for marking products with unique identification codes, associating times with at least some of the unique identification codes, and associating other times with certain events pertaining to the production of the marked products. These times can be used to subsequently determine whether a marked product belongs to a population that was produced before or after an event.

US Patent:

20110114177, May 19, 2011

Filed:

Jul 19, 2010

Appl. No.:

12/838861

Inventors:

Fan Yang - Sunnyvale CA, US
Lin Zhang - San Jose CA, US
Yi Zheng - Sunnyvale CA, US
Francimar Schmitt - Santa Clara CA, US
Zheng Yuan - Cupertino CA, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

H01L 31/0264
H01L 31/0376
H01L 31/20

US Classification:

136258, 438 96, 257E31048

Abstract:

A method and apparatus for forming solar cells is provided. In one embodiment, a photovoltaic device includes a first p-i-n junction cell formed on a substrate, wherein the p-i-n junction cell comprises a p-type silicon containing layer, an intrinsic type silicon containing layer formed over the p-type silicon containing layer, and a n-type silicon containing layer formed over the intrinsic type silicon containing layer, wherein the intrinsic type silicon containing layer comprises a first pair of microcrystalline layer and amorphous silicon layer.