Linjun Cao

US Patent:

20190067056, Feb 28, 2019

Filed:

Aug 22, 2017

Appl. No.:

15/682704

Inventors:

- Grand Cayman, KY
Anil Kumar - Clifton Park NY, US
Yuncheng Song - Halfmoon NY, US
Kong Boon Yeap - Clifton Park NY, US
Linjun Cao - Ballston Lake NY, US
Seungman Choi - Loudonville NY, US
Cathryn J. Christiansen - Huntington VT, US
Patrick R. Justison - Clifton Park NY, US

Assignee:

GLOBALFOUNDRIES INC. - Grand Cayman

International Classification:

H01L 21/67
G01R 3/00
G01R 31/12
H01L 21/66

Abstract:

An exemplary apparatus includes a testing module connected to, and providing a test voltage to, an integrated circuit containing devices under test. The testing module performs a time-dependent dielectric breakdown (TDDB) test on the devices under test. A decoder is connected to the devices under test and the testing module. The decoder selectively connects each device being tested to the testing module. Efuses are connected to a different one of the devices under test. The efuses separately electrically disconnect each of the devices under test from the test voltage upon failure of a corresponding device under test. Protection circuits are connected between the efuses and a ground voltage. Each protection circuit provides a shunt around the decoder upon failure of the device under test.