- Santa Clara CA, US Lynn YANG - Santa Clara CA, US Christy PAN - Santa Clara CA, US Beom Soo PARK - San Jose CA, US Young-Jin CHOI - San Jose CA, US Max CHANG - Santa Clara CA, US
International Classification:
H01J 37/32 C23C 16/44 C23C 16/50 B08B 7/00
Abstract:
A method and apparatus for obtaining at least one normalized baseline spectrum for a processing volume of a processing chamber; calculating a distribution value of the normalized baseline spectrum; obtaining a plurality of normalized cleaning process spectrums; calculating a distribution function of the plurality of normalized cleaning process spectrums; comparing the distribution value to the distribution function; and determining an end point by identifying when the distribution function approaches the distribution value. A method includes: initiating a cleaning process in a processing chamber, flowing a cleaning gas into a processing volume of the processing chamber; obtaining a normalized baseline spectrum; measuring a plurality of intensity spectrums; calculate a plurality of normalized cleaning process spectrums; comparing a distribution value of the normalized baseline spectrum to a distribution function of the plurality of normalized cleaning process spectrums; and determining an end point by identifying when the distribution function approaches the distribution value.
Medical Rehabilitation CenterMedical Rehabilitation Centers OF Pennsylvania 1608 Walnut St FL 4, Philadelphia, PA 19103 (215)5455630 (phone), (215)5455678 (fax)
Medical Rehabilitation Center 580 W Germantown Pike STE 106, Plymouth Meeting, PA 19462 (610)8283110 (phone), (610)8289116 (fax)
Medical Rehabilitation CenterMedical Rehabilitation Center Of Pennsylvania 419 Lawrence Rd, Broomall, PA 19008 (610)3532800 (phone), (610)3535963 (fax)
Medical Rehabilitation CenterMedical Rehabilitation Center West Chester 1103 Paoli Pike, West Chester, PA 19380 (610)6928885 (phone), (610)6929881 (fax)
Medical Rehabilitation CenterMedical Rehabilitation Centers 2311 Cottman Ave, Philadelphia, PA 19149 (215)3313414 (phone), (215)3319363 (fax)
Education:
Medical School Thomas Jefferson University, Jefferson Medical College Graduated: 1995
Languages:
English
Description:
Dr. Yang graduated from the Thomas Jefferson University, Jefferson Medical College in 1995. She works in Philadelphia, PA and 4 other locations and specializes in Physical Medicine & Rehabilitation. Dr. Yang is affiliated with Aria Health Torresdale Campus.