Kla-Tencor Sep 1, 2010 - Oct 2008
Senior Optical Engineer
Applied Materials Oct 2008 - Sep 2010
Member of Technical Staff
Spectra-Physics Mar 2001 - Mar 2004
Senior Fiber Laser Engineer
Sameer (R&D of Dit, Govt of India) 1993 - 1997
Scientific Officer
Kla-Tencor 1993 - 1997
Senior Optical Design Engineer Corp
Education:
The University of Electro - Communications 1997 - 2000
Doctorates, Doctor of Philosophy
Indian Institute of Science (Iisc) 1990 - 1993
Master of Science, Masters
The American College of Financial Services 1988 - 1990
Master of Science, Masters
Skills:
Fiber Optics Optics Engineering Management Algorithms Matlab Laser Sensors Troubleshooting Optical Fiber Mems Image Processing Characterization Design For Manufacturing Labview Manufacturing Design of Experiments Monte Carlo Nonlinear Optics Semiconductors Simulations Zemax Project Management Tolerance Analysis Design Metrology
KLA-Tencor Corp Milpitas, CA Sep 2010 to Sep 2010 Senior Optical EngineerApplied Materials Santa Clara, CA Oct 2008 to Aug 2010 Member of Technical StaffKLA-Tencor Corp Milpitas, CA Oct 2004 to Sep 2008 Senior Optical EngineerSpectra Physics Mountain View, CA Apr 2001 to Feb 2004 Senior Fiber Laser EngineerSociety for Applied Microwave Electronics Engineering and Research Mumbai, Maharashtra Mar 1993 to Mar 1997 Scientific Officer
Education:
University of Electro-Communications Tokyo, JP Apr 1997 to Feb 2001 Doctorate of Philosophy in Electronics EngineeringIndian Institute of Science Bangalore, Karnataka Aug 1990 to Jul 1993 Master of Science in Electrical Communication EngineeringThe American College Madurai, Tamil Nadu Aug 1988 to Jul 1990 Master of Science in Physics
Mahendra P. Ramachandran - Palo Alto CA, US Steven W. Meeks - Palo Alto CA, US Alireza S. Moghadam - San Jose CA, US Hung P. Nguyen - Santa Clara CA, US
Assignee:
KLA-Tencor Corporation - Milpitas CA
International Classification:
G01N 21/00 G01N 21/55
US Classification:
3562371, 356445, 3562372, 3562374, 3562375
Abstract:
An apparatus for inspecting an edge of a substrate. A light source produces a light beam, and a two-dimensional beam deflector receives the light beam and creates a semi-annular scanning beam. A first flared parabolic surface receives the semi-annular scanning beam and directs the semi-annular scanning beam onto the edge of the substrate, thereby creating specularly reflected light from the edge of the substrate. A second flared parabolic surface receives and directs the specularly reflected light to a detector. The detector receives the directed specularly reflected light and produces signals. An analyzer analyzes the signals and detects defects at the edge of the substrate.
Wide Spatial Frequency Topography And Roughness Measurement
Steven W. Meeks - Fremont CA, US Mahendra Prabhu Ramachandran - Palo Alto CA, US Alireza Shahdoost Moghadam - San Jose CA, US
International Classification:
G01N 21/00
US Classification:
356 73
Abstract:
In one embodiment, a system to inspect a surface comprises an assembly to direct a first radiation beam onto a surface in a first plane of incidence, a first detector to generate a first signal from a portion of the radiation reflected from the first radiation beam, a first spatial filter interposed between the surface and the first detector, a first ellipsoidal mirror to collect scattered light, a second detector to generate a second signal from the scattered portion of the beam, and a processor to generate, from the first and second signals, a data set representing one or more characteristics of the surface using the first and second signals.