Mark R Harless

US Patent:

6826298, Nov 30, 2004

Filed:

Apr 29, 2000

Appl. No.:

09/562273

Inventors:

Jeffrey ODell - Deephaven MN
Thomas Verburgt - Eden Prairie MN
Mark Harless - New Hope MN
Cory Watkins - Ramsey MN

Assignee:

August Technology Corp. - Bloomington MN

International Classification:

G06K 900

US Classification:

382149, 25055939

Abstract:

An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and designed for second optical wafer inspection, for such defects as metalization defects (such as scratches, voids, corrosion, and bridging), diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.

US Patent:

6937753, Aug 30, 2005

Filed:

Apr 29, 2000

Appl. No.:

09/561570

Inventors:

Jeffrey O'Dell - Deephaven MN, US
Thomas Verburgt - Eden Prairie MN, US
Mark Harless - New Hope MN, US
Steve Herrmann - Chaska MN, US

Assignee:

August Technology Corp. - Bloomington MN

International Classification:

G06K009/00

US Classification:

382141, 382145, 382149, 348126, 348 86, 438 16

Abstract:

An automated defect inspection system has been invented and is used on patterned wafers, whole wafers, broken wafers, partial wafers, sawn wafers such as on film frames, JEDEC trays, Auer boats, die in gel or waffle packs, MCMs, etc. and is specifically intended and designed for second optical wafer inspection for such defects as metalization defects (such as scratches, voids, corrosion, and bridging), diffusion defects, passivation layer defects, scribing defects, glassivation defects, chips and cracks from sawing, solder bump defects, and bond pad area defects.

US Patent:

7111095, Sep 19, 2006

Filed:

Apr 25, 2003

Appl. No.:

10/423475

Inventors:

Cory M. Watkins - Chanhassen MN, US
Mark R. Harless - Plymouth MN, US

Assignee:

August Technology Corp. - Bloomington MN

International Classification:

G06F 13/00
G06F 15/173

US Classification:

710 72, 710316, 710 62, 710 8, 710 9, 710 10, 709253, 709223, 709201

Abstract:

A frame grabber with switched fabric interface where in varying embodiments the fabric interface may be one of InfiniBand, Star Fabric, or PCI Express or the like.

US Patent:

7170075, Jan 30, 2007

Filed:

Jul 18, 2003

Appl. No.:

10/622848

Inventors:

Norman L. Oberski - Chaska MN, US
Mark R. Harless - Plymouth MN, US

Assignee:

Rudolph Technologies, Inc. - Flanders NJ

International Classification:

G01N 21/84
G01N 21/88
G01N 21/86
G01B 11/06

US Classification:

25055927, 25055919, 25055922, 356630, 382145

Abstract:

An inspection system, and process for use thereof, for inspecting semiconductors or like substrates. The inspection system includes an inspection device and an auxiliary sensor apart from the inspection device. The auxiliary sensor is used to collect height data and generate a map of a semiconductor or like substrate to aids in focusing the inspection device.

US Patent:

7196300, Mar 27, 2007

Filed:

Jul 11, 2005

Appl. No.:

11/179047

Inventors:

Cory Watkins - Chanhassen MN, US
Mark Harless - Plymouth MN, US
David Vaughnn - Edina MN, US
Pat Simpkins - Edina MN, US
Shaileshkumar Goyal - Rajasthan, IN
Gerald Brown - Plano TX, US
Brian Delsey - Frisco TX, US

Assignee:

Rudolph Technologies, Inc. - Flanders NJ

International Classification:

G02B 7/04
G01N 21/86

US Classification:

2502012, 25055905, 25055907, 25055929, 25055939, 356601, 356614, 356394

Abstract:

A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part of an optical train of an imaging mechanism, a sensor for measuring a distance to the target surface, and a mechanism for modifying the depth of focus of the objective, prism or other optical device. Data from the sensor may be used to create a predictive model of the target surface. Data from the sensor is also used to fit or correlate the generated model to an exemplary target. Data from the correlated model is used to drive the mechanism for modifying the depth of focus of the objective, prism, or other optical device to maintain the surface of the exemplary target in focus.

US Patent:

7321108, Jan 22, 2008

Filed:

Jan 22, 2007

Appl. No.:

11/625640

Inventors:

Cory Watkins - Eden Prairie MN, US
Mark Harless - Plymouth MN, US
David Vaughnn - Edina MN, US
Pat Simpkins - Edina MN, US
Shaileshkumar Goyal - Rajasthan, IN
Gerald Brown - Plano TX, US
Brian Delsey - Frisco TX, US

Assignee:

Rudolph Technology, Inc. - Flanders NJ

International Classification:

G02B 7/04
G02B 27/40
G02B 21/36
G01N 21/00

US Classification:

2502012, 2502013, 2502014, 25055905, 25055907, 25055908, 25055929, 356601, 356609, 356614, 356624, 359368, 359379, 359380, 359678, 359694, 359698, 359823, 359432

Abstract:

A method and apparatus for dynamically focusing an imaging mechanism on a moving target surface having a variable geometry is herein disclosed. Apparatus for focusing an imaging mechanism may include an objective, a prism, or another optical device that forms part of an optical train of an imaging mechanism, a sensor for measuring a distance to the target surface, and a mechanism for modifying the depth of focus of the objective, prism or other optical device. Data from the sensor may be used to create a predictive model of the target surface. Data from the sensor is also used to fit or correlate the generated model to an exemplary target. Data from the correlated model is used to drive the mechanism for modifying the depth of focus of the objective, prism, or other optical device to maintain the surface of the exemplary target in focus.

US Patent:

7340087, Mar 4, 2008

Filed:

Jul 14, 2004

Appl. No.:

10/890762

Inventors:

Cory Watkins - Chanhassen MN, US
Mark Harless - Plymouth MN, US
Francy Abraham - Singapore, SG

Assignee:

Rudolph Technologies, Inc. - Flanders NJ

International Classification:

G06K 9/00
G01N 21/86

US Classification:

382145, 25055936

Abstract:

A semiconductor inspection tool comprises an edge top camera for obtaining images of a top edge of a wafer, an edge normal camera for obtaining images of a normal edge of the wafer, and a controller for receiving the images of the top edge of the wafer and the images of the normal edge of the wafer and for analyzing the images of the top edge of the wafer and the images of the normal edge of the wafer for wafer edge defects.

US Patent:

7629993, Dec 8, 2009

Filed:

Sep 30, 2002

Appl. No.:

10/262173

Inventors:

Mark Harless - Plymouth MN, US
Jeremy Jenum - Plymouth MN, US
Willard Charles Raymond - Plymouth MN, US

Assignee:

Rudolph Technologies, Inc. - Flanders NJ

International Classification:

H04N 9/47

US Classification:

348126, 348 76

Abstract:

A defect inspection system for the semiconductor and microelectronics industry. More particularly, the present invention relates to an automated defect inspection system for wafers or other semiconductor or electronic substrates of any kind or type that are transparent, translucent, opaque or otherwise capable of allowing at least some light to pass through.

Address:

13000 38 Pl N, Plymouth, MN 55441

Phone:

(763)5190498

VIN:

1GNSKKE78CR270847

Make:

CHEVROLET

Model:

SUBURBAN

Year:

2012