Mark A Miles

US Patent:

6574033, Jun 3, 2003

Filed:

Feb 27, 2002

Appl. No.:

10/084893

Inventors:

Clarence Chui - Emeryville CA
Mark W. Miles - San Francisco CA

Assignee:

Iridigm Display Corporation - San Francisco CA

International Classification:

G02B 2600

US Classification:

359291, 359247

Abstract:

One aspect of the invention provides a method for fabricating a microelectromechanical systems device. The method comprises fabricating an array of first elements, each first element conforming to a first geometry; fabricating at least one array of second elements, each second element conforming to a second geometry; wherein fabricating the arrays comprises selecting a defining aspect of each of the first and second geometries based on a defining characteristic of each of the first and second elements; and normalizing differences in an actuation voltage required to actuate each of the first and second elements, wherein the differences are as a result of the selected defining aspect, the defining characteristic of each of the elements being unchanged.

US Patent:

6650455, Nov 18, 2003

Filed:

Nov 13, 2001

Appl. No.:

10/012092

Inventors:

Mark W. Miles - San Francisco CA

Assignee:

Iridigm Display Corporation - San Francisco CA

International Classification:

G02F 100

US Classification:

359237, 359290, 359291

Abstract:

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMods electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed.

US Patent:

6710908, Mar 23, 2004

Filed:

Feb 13, 2002

Appl. No.:

10/076224

Inventors:

Mark W. Miles - San Francisco CA
Clarence Chui - Emeryville CA

Assignee:

Iridigm Display Corporation - San Francisco CA

International Classification:

G02B 2600

US Classification:

359290, 359291, 359292, 372 20, 372 32

Abstract:

Among other things, a cavity having a cavity dimension is configured so that the cavity dimension changes in response to electrostatic forces applied to the cavity, and at least two electrical structures are configured to apply electrostatic forces in the vicinity of the cavity, the electrical structures being independently controllable.

US Patent:

6741377, May 25, 2004

Filed:

Jul 2, 2002

Appl. No.:

10/190400

Inventors:

Mark W. Miles - San Francisco CA

Assignee:

Iridigm Display Corporation - San Francisco CA

International Classification:

G02F 103

US Classification:

359243, 359247, 359254, 359291, 359587, 385 14, 430 5, 430322, 430323, 216 12

Abstract:

The invention provides a method for fabricating an optical device comprising at least one optical component formed on a transparent substrate. The method comprises determining an area of the substrate that is to be light-absorbing; and fabricating a light-absorbing mask on the determined area prior to fabricating the at least one optical component. The invention also provides an optical device comprising a substrate; and first and second optical components formed on the substrate, wherein the first optical component has two modes, each mode producing a different optical response to light incident thereupon, and wherein the second optical component absorbs light and is formed on the substrate before the first optical component is formed.

US Patent:

6794119, Sep 21, 2004

Filed:

Feb 12, 2002

Appl. No.:

10/074562

Inventors:

Mark W. Miles - San Francisco CA

Assignee:

Iridigm Display Corporation - San Francisco CA

International Classification:

G03F 700

US Classification:

430313, 430311, 430314, 430316, 430317, 430318, 430322, 430394

Abstract:

The invention provides a microfabrication process which may be used to manufacture a MEMS device. The process comprises depositing one or a stack of layers on a base layer, said one layer or an uppermost layer in said stack of layers being a sacrificial layer; patterning said one or a stack of layers to provide at least one aperture therethrough through which said base layer is exposed; depositing a photosensitive layer over said one or a stack of layers; and passing light through said at least one aperture to expose said photosensitive layer.

US Patent:

7012726, Mar 14, 2006

Filed:

Nov 3, 2003

Appl. No.:

10/700641

Inventors:

Mark W. Miles - San Francisco CA, US

Assignee:

IDC, LLC - San Francisco CA

International Classification:

G02B 26/00
H01L 21/302

US Classification:

359245, 359254

Abstract:

In one embodiment, the invention provides a MEMS device. The MEMS device comprises a plurality of functional components including at least one moveable component; and a sacrificial component to at least reduce movement of the moveable component during shipping of the microelectromechanical systems device, wherein the sacrificial component can be removed after shipping.

US Patent:

7012732, Mar 14, 2006

Filed:

Mar 1, 2005

Appl. No.:

11/070497

Inventors:

Mark W. Miles - San Francisco CA, US

Assignee:

IDC, LLC - San Francisco CA

International Classification:

G02B 26/00

US Classification:

359290

Abstract:

Light in the visible spectrum is modulated using an array of modulation elements, and control circuitry connected to the array for controlling each of the modulation elements independently, each of the modulation elements having a surface which is caused to exhibit a predetermined impedance characteristic to particular frequencies of light. The amplitude of light delivered by each of the modulation elements is controlled independently by pulse code modulation. Each modulation element has a deformable portion held under tensile stress, and the control circuitry controls the deformation of the deformable portion. Each deformable element has a deformation mechanism and an optical portion, the deformation mechanism and the optical portion independently imparting to the element respectively a controlled deformation characteristic and a controlled modulation characteristic. The deformable modulation element may be a non-metal. The elements are made by forming a sandwich of two layers and a sacrificial layer between them, the sacrificial layer having a thickness related to the final cavity dimension, and using water or an oxygen based plasma to remove the sacrificial layer.

US Patent:

7110158, Sep 19, 2006

Filed:

Aug 19, 2002

Appl. No.:

10/224029

Inventors:

Mark W. Miles - San Francisco CA, US

Assignee:

IDC, LLC - San Francisco CA

International Classification:

G02B 26/00

US Classification:

359291, 359290

Abstract:

An interference modulator (Imod) incorporates anti-reflection coatings and/or micro-fabricated supplemental lighting sources. An efficient drive scheme is provided for matrix addressed arrays of IMods or other micromechanical devices. An improved color scheme provides greater flexibility. Electronic hardware can be field reconfigured to accommodate different display formats and/or application functions. An IMod's electromechanical behavior can be decoupled from its optical behavior. An improved actuation means is provided, some one of which may be hidden from view. An IMod or IMod array is fabricated and used in conjunction with a MEMS switch or switch array. An IMod can be used for optical switching and modulation. Some IMods incorporate 2-D and 3-D photonic structures. A variety of applications for the modulation of light are discussed.