Mark S Rea

US Patent:

6764168, Jul 20, 2004

Filed:

Mar 1, 2002

Appl. No.:

10/087539

Inventors:

Henner W. Meinhold - Fremont CA
Mark L. Rea - Hayward CA
Sachin M. Chinchwadkar - Milpitas CA
Fred J. Chetcuti - Milbrae CA
John S. Drewery - Alameda CA

Assignee:

Novellus Systems, Inc. - San Jose CA

International Classification:

B41J 2125

US Classification:

347 81

Abstract:

In one embodiment, a sensor includes two plates that form a capacitor. A droplet passing between the plates changes the capacitance of the sensor, thereby triggering an amplifier coupled to the sensor to generate an output signal. The output signal is indicative of droplet characteristics and may be used to calibrate a mechanism that dispensed the droplet.

US Patent:

7091134, Aug 15, 2006

Filed:

Jun 17, 2003

Appl. No.:

10/464279

Inventors:

Henner W. Meinhold - Fremont CA, US
Wayne Cai - Milpitas CA, US
Mark L. Rea - Hayward CA, US
Sachin M. Chinchwadkar - Milpitas CA, US

Assignee:

Novellus Systems, Inc. - San Jose CA

International Classification:

H01L 21/31

US Classification:

438758, 438 5, 438 14

Abstract:

In one embodiment, an integrated circuit (IC) fabrication material is dispensed from a print head by dividing its nozzles into several groups, and sequentially allowing each group to fire. The nozzles may be grouped based on the amounts of material they dispense. For example, the nozzles may be grouped by drop volume or drop mass. In one embodiment, an IC fabrication material is dispensed on a substrate by controlling a firing sequence of a nozzle to promote merging of material on the substrate. The firing sequence may also be altered to take into account the firing sequence of adjacent nozzles.