Mark A Walters

US Patent:

6386507, May 14, 2002

Filed:

Mar 8, 2001

Appl. No.:

09/802260

Inventors:

Vijayakumar R. Dhuler - Raleigh NC
Mark David Walters - Durham NC

Assignee:

JDS Uniphase Corporation - Research Triangle Park NC

International Classification:

F16K 3100

US Classification:

251 11, 310307

Abstract:

A microelectromechanical (MEMS) device is provided that includes a microelectronic substrate and a thermally actuated microactuator and associated components disposed on the substrate and formed as a unitary structure from a single crystalline material, wherein the associated components are actuated by the microactuator upon thermal actuation thereof. For example, the MEMS device may be a valve. As such, the valve may include at least one valve plate that is controllably brought into engagement with at least one valve opening in the microelectronic substrate by selective actuation of the microactuator. While the MEMS device can include various microactuators, the microactuator advantageously includes a pair of spaced apart supports disposed on the substrate and at least one arched beam extending therebetween. By heating the at least one arched beam of the microactuator, the arched beams will further arch such that the microactuator moves between a closed position in which the valve plate sealingly engages the valve opening and an open position in which the valve plate is at least partly disengaged from and does not seal the valve opening.

US Patent:

6428173, Aug 6, 2002

Filed:

May 3, 1999

Appl. No.:

09/304301

Inventors:

Vijayakumar R. Dhuler - Raleigh NC
Mark David Walters - Durham NC
Edward A. Hill - Chapel Hill NC
Allen Bruce Cowen - Cary NC

Assignee:

JDS Uniphase, Inc. - San Jose CA

International Classification:

G02B 508

US Classification:

359872, 359881, 359223, 359224, 359230

Abstract:

Microelectromechanical structures (MEMS) are provided that are adapted to controllably move mirrors in response to selective thermal actuation. In one embodiment, the MEMS moveable mirror structure includes a thermally actuated microactuator adapted to controllably move along a predetermined path substantially parallel to the first major surface of an underlying microelectronic substrate. A mirror is adapted to move accordingly with the microactuator between a non-actuated and an actuated position. In all positions, the mirror has a mirrored surface disposed out of plane relative to the first major surface of the microelectronic substrate. The microactuator provided herein can include various thermal arched beam actuators, thermally actuated composite beam actuators, arrayed actuators, and combinations thereof. The MEMS moveable mirror structure can also include a mechanical latch and/or an electrostatic latch for controllably clamping the mirror in position. A MEMS moveable mirror array is also provided which permits individualized control of each individual MEMS moveable mirror structure within the array.

US Patent:

6504968, Jan 7, 2003

Filed:

Aug 30, 2000

Appl. No.:

09/650990

Inventors:

Terry D. Zhu - Cary NC
John S. McKillop - Raleigh NC
Mark D. Walters - Durham NC

Assignee:

JDS Uniphase Inc. - San Jose CA

International Classification:

G02B 635

US Classification:

385 18, 385 16, 359223

Abstract:

Embodiments of the present invention can provide a substrate and a moveable reflector, on the substrate, having first and second opposing surfaces, wherein the moveable reflector moves to first and second positions on the substrate. A latch is located on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the moveable reflector, wherein the latch holds the moveable reflector in the first and second positions. An actuator is located on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and is coupled to the latch, wherein the actuator moves the moveable reflector to the first and second positions. Also disclosed are moveable reflectors having a first reflecting position along an input beam path that reflects optical radiation from the input beam path along a first reflected beam path and a second reflecting position along the input beam path spaced-apart from the first reflecting position that reflects optical radiation from the input beam path along a second reflected beam path parallel to the first reflected beam path. Related methods are also disclosed.

US Patent:

6555201, Apr 29, 2003

Filed:

May 15, 2000

Appl. No.:

09/570628

Inventors:

Vijayakumar R. Dhuler - Raleigh NC
David A. Koester - Burlington NC
Mark D. Walters - Durham NC
Karen W. Markus - Raleigh NC

Assignee:

MCNC - Research Triangle Park NC

International Classification:

B32B 310

US Classification:

428137, 428131, 428141, 428156, 438703, 438704, 438745, 438756, 249 61, 2491141

Abstract:

An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90Â angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis.

US Patent:

6636655, Oct 21, 2003

Filed:

Aug 24, 2001

Appl. No.:

09/939060

Inventors:

Terry D. Zhu - Cary NC
Mark Walters - Durham NC

Assignee:

Memscap S.A.

International Classification:

G02B 626

US Classification:

385 18, 385 17, 385 19, 385 22

Abstract:

MEMS optical switches can include a substrate having first and second opposing faces and at least one side therebetween. An input is obliquely angled towards the face and optically couples optical radiation towards the face. A movable reflector is on the face and moves from a first position to a second position that is parallel to the first position to reflect the optical radiation from the input to provide reflected optical radiation. A output is obliquely angled away from the face and optically couples the reflected optical radiation away from the face.

US Patent:

20030095741, May 22, 2003

Filed:

Nov 18, 2002

Appl. No.:

10/298488

Inventors:

Terry Zhu - Cary NC, US
John McKillop - Raleigh NC, US
Mark Walters - Durham NC, US

International Classification:

G02B006/35

US Classification:

385/018000

Abstract:

Embodiments of the present invention can provide a substrate and a moveable reflector, on the substrate, having first and second opposing surfaces, wherein the moveable reflector moves to first and second positions on the substrate. A latch is located on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the moveable reflector, wherein the latch holds the moveable reflector in the first and second positions. An actuator is located on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and is coupled to the latch, wherein the actuator moves the moveable reflector to the first and second positions. Also disclosed are moveable reflectors having a first reflecting position along an input beam path that reflects optical radiation from the input beam path along a first reflected beam path and a second reflecting position along the input beam path spaced-apart from the first reflecting position that reflects optical radiation from the input beam path along a second reflected beam path parallel to the first reflected beam path. Related methods are also disclosed.

US Patent:

61340421, Oct 17, 2000

Filed:

Apr 1, 1999

Appl. No.:

9/283030

Inventors:

Vijayakumar R. Dhuler - Raleigh NC
David A. Koester - Burlington NC
Mark D. Walters - Durham NC
Karen W. Markus - Raleigh NC

Assignee:

MCNC - Research Triangle Park NC

International Classification:

G02B 2608

US Classification:

359224

Abstract:

An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90. degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis.

US Patent:

62561340, Jul 3, 2001

Filed:

Jul 28, 2000

Appl. No.:

9/628054

Inventors:

Vijayakumar R. Dhuler - Raleigh NC
David A. Koester - Burlington NC
Mark D. Walters - Durham NC
Karen W. Markus - Raleigh NC

Assignee:

MCNC - Research Triangle Park NC

International Classification:

G02B 2608

US Classification:

359212

Abstract:

An electromechanical device includes a first frame having a first aperture therein, a second frame suspended in the first frame wherein the second frame has a second aperture therein, and a plate suspended in the second aperture. A first pair of beams support the second frame along a first axis relative to the first frame so that the second frame rotates about the first axis. A second pair of beams supports the plate along a second axis relative to the second frame so that the plate rotates about the second axis relative to the frame. The first and second axes preferably intersect at a 90. degree. angle. A first actuator provides mechanical force for rotating the second frame relative to the first frame about the first axis. A second actuator provides mechanical force for rotating the plate relative to the second frame about the second axis. Accordingly, the plate can be independently rotated relative to the first axis and the second axis.