Martin J Lee

US Patent:

6355994, Mar 12, 2002

Filed:

Apr 5, 2000

Appl. No.:

09/543265

Inventors:

Gerry B. Andeen - Menlo Park CA
Martin E. Lee - Saratoga CA

Assignee:

Multibeam Systems, Inc. - Santa Clara CA
Motorola Inc. - Schaumburg IL

International Classification:

H02K 3300

US Classification:

310 15, 310 12, 310 905, 248550, 248638

Abstract:

An ultra-high precision stage incorporating a novel, legged design suitable for applications requiring high voltage and vacuum is disclosed herein. The stage comprises: a base; a frame attached to the base; a platform with a bottom platform surface; at least three adjustable limbs coupled to the base and the bottom platform surface, each limb comprising a raising member attached to the base, a first attachment member attached to the raising member, a leg, a bottom end of the leg attached to the first attachment member, a second attachment member attached to a top end of the leg and the second attachment member attached to the bottom platform surface; and platform movement members coupled to the platform and the frame, providing precise positioning and movement of the platform. The attachment members can be flexure joints; further, they can be flexural thrust joints. The platform can have six degrees of freedom of movement and accommodate wafers with diameters of 300 mm.

US Patent:

6471435, Oct 29, 2002

Filed:

Apr 5, 2000

Appl. No.:

09/543283

Inventors:

Martin E. Lee - Saratoga CA

Assignee:

Multibeam Systems, Inc. - Santa Clara CA
Motorola, Inc. - Schaumburg IL

International Classification:

F16F 118

US Classification:

403220, 267160

Abstract:

A flexural joint, in particular a flexural thrust joint suitable for precision stages and application requiring vacuum is disclosed herein. A two degree of freedom joint comprises: two joint elements, each with a load bearing surface; two flexures attached between the elements, such that the flexures are under tension when the joint is subject to a compressive load. The flexures are long and thin, such that they can twist and bend, giving the joint two degrees of freedom. A three degree of freedom joint comprises: a first joint element with a load bearing surface; a second joint element with a second load bearing surface; a third joint element; two first flexures attached between the second and third elements; two second flexures attached between the third and first elements, such that both the first and second flexures are under tension when the joint is subject to a compressive load. Either one or both pairs of flexures are long and thin, such that they can twist and bend, giving the joint three degrees of freedom.

US Patent:

6590639, Jul 8, 2003

Filed:

Sep 15, 2000

Appl. No.:

09/663184

Inventors:

Bausan Yuan - San Jose CA
Michael Binnard - Belmont CA
Martin Lee - Saratoga CA

Assignee:

Nikon Corporation - Tokyo

International Classification:

G03B 2762

US Classification:

355 75, 355 53, 267136, 248550

Abstract:

An active vibration isolation system includes a pneumatic control system and an electronic control system. The pneumatic control system supports a mass sensitive to vibration and isolates the mass from high frequency external disturbances. The electronic control system isolates the mass from low frequency external disturbances. The pneumatic control system includes a compliance chamber filled with a fluid to pneumatically support the mass, apparatus for directly measuring a pressure level in the compliance chamber, and apparatus for controlling the pressure level to minimize the effects of pressure variation in the compliance chamber. The measuring apparatus includes an instrument to measure an absolute pressure level of the compliance chamber or an instrument to measure a differential pressure level between the compliance chamber and a reference chamber having a predetermined pressure level.

US Patent:

6646719, Nov 11, 2003

Filed:

Jan 31, 2001

Appl. No.:

09/773289

Inventors:

Martin E. Lee - Saratoga CA
Bausan Yuan - San Jose CA
Yutaka Hayashi - Yokohoma, JP

Assignee:

Nikon Corporation

International Classification:

G03B 2758

US Classification:

355 72, 355 53, 248638

Abstract:

A support assembly ( ) for an exposure apparatus ( ) is provided herein. The support assembly ( ) supports the components of the exposure apparatus ( ) above a mounting base ( ). The exposure apparatus ( ) includes noisy components ( ) and quiet components ( ). The support assembly ( ) includes an outer frame ( ) and an inner frame ( ). As provided herein, the outer frame ( ) supports some of the components of the exposure apparatus ( ) and the inner frame ( ) supports some of the components of the exposure apparatus ( ). Preferably, the outer frame ( ) is used to support the quiet components ( ) while the inner frame ( ) is used to support the noisy components ( ). Uniquely, a portion of the inner frame ( ) is positioned within a portion of the outer frame ( ). As a result of this design, both frames ( ) ( ) can effectively be mounted at the same mounting locations of the mounting base ( ). Further, the overall space taken up by the frames ( ) ( ) is minimized.

US Patent:

6683433, Jan 27, 2004

Filed:

Sep 28, 2001

Appl. No.:

09/964550

Inventors:

Martin E. Lee - Saratoga CA

Assignee:

Nikon Corporation - Tokyo

International Classification:

H01L 21027

US Classification:

318649, 318611, 318687, 248638, 74471 XY

Abstract:

A guided stage mechanism suitable for supporting a reticle in a photolithography machine includes a stage movable in the X-Y directions on a base. Laterally surrounding the stage is a rectangular window frame guide which is driven in the X-axis direction on two fixed guides by means of motor coils on the window frame guide co-operating with magnetic tracks fixed on the base. The stage is driven inside the window frame guide in the Y-axis direction by motor coils located on the stage co-operating with magnetic tracks located on the window frame guide. Forces from the drive motors of both the window frame guide and the stage are transmitted through the center of gravity of the stage, thereby eliminating unwanted moments of inertia. Additionally, reaction forces caused by the drive motors are isolated from the projection lens and the alignment portions of the photolithography machine. This isolation is accomplished by providing a mechanical support for the stage independent of the support for its window frame guide.

US Patent:

6747732, Jun 8, 2004

Filed:

Jul 2, 2003

Appl. No.:

10/611260

Inventors:

Martin E. Lee - Saratoga CA

Assignee:

Nikon Corporation - Tokyo

International Classification:

G03B 2762

US Classification:

355 75, 355 53, 355 72

Abstract:

A guided stage mechanism suitable for supporting a reticle in a photolithography machine includes a stage movable in the X-Y directions on a base. Laterally surrounding the stage is a rectangular window frame guide which is driven in the X-axis direction on two fixed guides by means of motor coils on the window frame guide co-operating with magnetic tracks fixed on the base. The stage is driven inside the window frame guide in the Y-axis direction by motor coils located on the stage co-operating with magnetic tracks located on the window frame guide. Forces from the drive motors of both the window frame guide and the stage are transmitted through the center of gravity of the stage, thereby eliminating unwanted moments of inertia. Additionally, reaction forces caused by the drive motors are isolated from the projection lens and the alignment portions of the photolithography machine. This isolation is accomplished by providing a mechanical support for the stage independent of the support for its window frame guide.

US Patent:

6819924, Nov 16, 2004

Filed:

Jan 24, 2001

Appl. No.:

09/744521

Inventors:

Wei Ma - Castro Valley CA
Martin Lee - Hayward CA
Kambiz Homayounfar - Tokyo, JP

Assignee:

National Semiconductor Corporation - Santa Clara CA

International Classification:

H04Q 734

US Classification:

455425, 455 6714, 370241, 370249

Abstract:

A method for measuring perceptual quality of voice signals, audio signals, audio-video signals, and multimedia signals in communication equipment in an operational embodiment communicates a processed test signal via a network from a first device to a second device. The processed test signal is then received by an equipment under test, which further processes the processed test signal to recover a representation of the test signal. The recovered test signal is then objectively analyzed to determine a measure of perceptual quality by comparing the recovered test signal to a pre-stored representation of the test signal. A quality measurement unit that conveniently attaches to equipment under test identifies and evaluates quality of recovered test signals communicated from a remote device, or a test signal communicated by the equipment under test. In the latter case, the quality measurement unit communicates with both the equipment under test and with the network, so that the quality measurement unit itself receives a representation of the communicated test signal by the equipment under test.

US Patent:

6823302, Nov 23, 2004

Filed:

Jan 24, 2001

Appl. No.:

09/744423

Inventors:

Ian Atkinson - Union City CA
Martin Lee - Hayward CA
Wei Ma - Castro Valley CA
Kambiz Homayounfar - Tokyo, JP

Assignee:

National Semiconductor Corporation - Santa Clara CA

International Classification:

G10L 2100

US Classification:

704216, 7042001, 379 102, 379 2703

Abstract:

A method for providing real-time perceptual quality measurements of an audio signal ( ) in which a quality test signal, including an audio test signal, is received by equipment under test. Playback of a pre-stored representation of the audio signal is coarsely synchronized ( ) to the received audio test signal, for example, utilizing a synchronizing pulse in a header of the quality test signal. The playback is then finely synchronized ( ) to the received audio signal, for example, by comparing data in a windowed portion of the received audio test signal and a windowed portion of the pre-stored representation of the audio test signal and by adjusting a windowed portion of the pre-stored representation of the audio test signal in accordance with results of the comparison. A window of the received audio test singal is then compared ( ) to a portion of the finely synchronized play back of the pre-stored representation of the audio test signal to output a quality measurement of the received audio test signal.