Maw Si Tun

US Patent:

20050241767, Nov 3, 2005

Filed:

Apr 30, 2004

Appl. No.:

10/836516

Inventors:

David Ferris - Rockville MD, US
Aseem Srivastava - Germantown MD, US
Maw Tun - Rockville MD, US

International Classification:

C23F001/00

US Classification:

156345350

Abstract:

A plasma processing system includes at least one multi-piece baffle plate. The multi-piece baffle plate assembly generally comprises at least one annular shaped ring portion having an opening and an insert portion dimensioned to sit within the opening. The individual pieces can be formed of a ceramic material. The effects caused by thermal gradients in the plate during plasma processing are minimized.