Michael F Barker

US Patent:

20200061544, Feb 27, 2020

Filed:

Aug 21, 2019

Appl. No.:

16/546315

Inventors:

- North Kingstown RI, US
Bryan Hinzie - Gilbert AZ, US
Michael Barker - Goodyear AZ, US
Jack Helzer - Chandler AZ, US
Shen-Ping Huang - HsinChu County, TW
Yuan Chen - Chandler AZ, US

Assignee:

FUJIFILM Electronic Materials U.S.A., Inc. - North Kingstown RI

International Classification:

B01D 65/02
B01D 61/02
B01D 71/36
H01L 21/67

Abstract:

A method for process a chemical liquid is provided. The method includes at least providing a system having at least one filtration medium, treatment the system with a treatment liquid having a content of iron (Fe) and calcium (Ca) of about 10 ppb or less, and processing a chemical liquid using an apparatus having the system configured therein after the treatment process.

US Patent:

20190308117, Oct 10, 2019

Filed:

Mar 29, 2019

Appl. No.:

16/368866

Inventors:

- North Kingstown RI, US
Michael Barker - Goodyear AZ, US
Perry Westberg - Goodyear AZ, US
Yuan Chen - Chandler AZ, US
Jack Helzer - Chandler AZ, US

Assignee:

FUJIFILM Electronic Materials U.S.A., Inc. - North Kingstown RI

International Classification:

B01D 15/18
B01D 15/36
B01D 61/08
B01D 61/02

Abstract:

A chemical liquid manufacturing apparatus, including a first system and a second system, is provided. The first system includes at least one first filtration medium, selected from a first filter, a first ion exchange membrane and a first ion adsorption membrane, wherein the first system is configured to process a material of at least one time. The second system includes at least one second filtration medium, selected from a second filter, a second ion exchange membrane and a second ion adsorption membrane, wherein the second system is configured for recirculation and to process the material of at least two times.