Robert T. Fuller - Melbourne Beach FL Chris McCarty - Melbourne FL John T. Gasner - Satellite Beach FL Michael D. Church - Sebastian FL
Assignee:
Intersil Americas Inc. - Irvine CA
International Classification:
H01L 218238
US Classification:
438202, 438234
Abstract:
To program a CMOS memory, an auxiliary bipolar transistor is formed in a P-well adjacent to the P-well of an NMOS device of the CMOS memory, the auxiliary transistor being capable of forcing a large magnitude current through a fusible link, so as to program the electronic state of the CMOS memory cell into a prescribed binary (1/0) condition. A separate implant mask for the emitter region of the auxiliary transistor allows the geometry and impurity concentration profile of the emitter region to be tailored by a deep dual implant, so that the impurity concentration of the emitter region is not decreased, and yields a reduced base width for the auxiliary transistor to provide a relatively large current gain to blow the fuse, while allowing the doping parameters of the source/drain regions of the CMOS structure to be separately established to prevent thyristor latch-up.
Method Of Fabricating Enhanced Eprom Structures With Accentuated Hot Electron Generation Regions
An EPROM structure includes a NMOS transistor integrated with a capacitor. The terminal names of the NMOS transistor follow the conventional nomenclature: drain, source, body and gate. The gate of the NMOS transistor is connected directly and exclusively to one of the capacitor plates. In this configuration, the gate is now referred to as the âfloating gateâ. The remaining side of the capacitor is referred to as the âcontrol gateâ.
Enhanced Eprom Structures With Accentuated Hot Electron Generation Regions
An EPROM structure includes a NMOS transistor integrated with a capacitor. The terminal names of the NMOS transistor follow the conventional nomenclature: drain, source, body and gate. The gate of the NMOS transistor is connected directly and exclusively to one of the capacitor plates. In this configuration, the gate is now referred to as the âfloating gateâ. The remaining side of the capacitor is referred to as the âcontrol gateâ.
Enhanced Eprom Structures With Accentuated Hot Electron Generation Regions
An EPROM structure includes a NMOS transistor integrated with a capacitor. The terminal names of the NMOS transistor follow the conventional nomenclature: drain, source, body and gate. The gate of the NMOS transistor is connected directly and exclusively to one of the capacitor plates. In this configuration, the gate is now referred to as the âfloating gateâ. The remaining side of the capacitor is referred to as the âcontrol gateâ.
Bicmos Process With Low Temperature Coefficient Resistor (Tcrl)
Donald Hemmenway - Melbourne FL Jose Delgado - Valkaria FL John Butler - Palm Bay FL Anthony Rivoli - Palm Bay FL Michael D. Church - Sebastian FL George V. Rouse - Indialantic FL Lawrence G. Pearce - Palm Bay FL George S. Bajor - Melbourne FL
Assignee:
Intersil Americas Inc. - Milpitas CA
International Classification:
H01L 2976
US Classification:
257370
Abstract:
A low temperature coefficient resistor (TCRL) has some unrepaired ion implant damage. The damaged portion raises the resistance and renders the resistor less sensitive to operating temperature fluctuations A polysilicon thin film low temperature coefficient resistor and a method for the resistors fabrication overcomes the coefficient of resistance problem of the prior art, while at the same time eliminating steps from the BiCMOS fabrication process, optimizing bipolar design tradeoffs, and improving passive device isolation. A low temperature coefficient of resistance resistor (TCRL) is formed on a layer of insulation, typically silicon dioxide or silicon nitride, the layer comprising polysilicon having a relatively high concentration of dopants of one or more species. An annealing process is used for the implanted resistor which is shorter than that for typical prior art implanted resistors, leaving some intentional unannealed damage in the resistor. The planned damage gives the TCRL a higher resistance without increasing its temperature coefficient.
Bicmos Process With Low Temperature Coefficient Resistor (Tcrl)
Donald Hemmenway - Melbourne FL Jose Delgado - Valkaria FL John Butler - Palm Bay FL Anthony Rivoli - Palm Bay FL Michael D. Church - Sebastian FL George V. Rouse - Indialantic FL Lawrence G. Pearce - Palm Bay FL George Bajor - Melbourne FL
Assignee:
Intersil Corporation - Palm Bay FL
International Classification:
H01L 2120
US Classification:
438385, 438330, 438382
Abstract:
A low temperature coefficient resistor(TCRL) has some unrepaired ion implant damage. The damaged portion raises the resistance and renders the resistor less sensitive to operating temperature fluctuations. A polysilicon thin film low temperature coefficient resistor and a method for the resistors fabrication overcomes the coefficient of resistance problem of the prior art, while at the same time eliminating steps from the BiCMOS fabrication process, optimizing bipolar design tradeoffs, and improving passive device isolation. A low temperature coefficient of resistance resistor (TCRL) is formed on a layer of insulation, typically silicon dioxide or silicon nitride, the layer comprising polysilicon having a relatively high concentration of dopants of one or more species. An annealing process is used for the implanted resistor which is shorter than that for typical prior art implanted resistors, leaving some intentional unannealed damage in the resistor. The planned damage gives the TCRL a higher resistance without increasing its temperature coefficient.
Method Of Fabricating Enhanced Eprom Structures With Accentuated Hot Electron Generation Regions
An EPROM structure includes a NMOS transistor integrated with a capacitor. The terminal names of the NMOS transistor follow the conventional nomenclature: drain, source, body and gate. The gate of the NMOS transistor is connected directly and exclusively to one of the capacitor plates. In this configuration, the gate is now referred to as the “floating gate”. The remaining side of the capacitor is referred to as the “control gate”.
Active Area Bonding Compatible High Current Structures
John T. Gasner - Satellite Beach FL, US Michael D. Church - Sebastian FL, US Sameer D. Parab - Fremont CA, US David A. Decrosta - Melbourne FL, US Robert L. Lomenick - Palm Bay FL, US Chris A. McCarty - Melbourne FL, US
Assignee:
Intersil American Inc. - Milpitas CA
International Classification:
H01L 21/44
US Classification:
438614, 438618, 438622, 438624, 438625, 438652
Abstract:
An integrated circuit with circuits under a bond pad. In one embodiment, the integrated circuit comprises a substrate, a top conductive layer, one or more intermediate conductive layers, layers of insulating material and devices. The top conductive layer has a at least one bonding pad and a sub-layer of relatively stiff material. The one or more intermediate conductive layers are formed between the top conductive layer and the substrate. The layers of insulating material separate the conductive layers. Moreover, one layer of the layers of insulating material is relatively hard and is located between the top conductive layer and an intermediate conductive layer closest to the top conductive layer. The devices are formed in the integrated circuit. In addition, at least the intermediate conductive layer closest to the top conductive layer is adapted for functional interconnections of select devices under the bond pad.