- Austin TX, US Paras Ajay - Austin TX, US Aseem Sayal - Austin TX, US Mark McDermott - Austin TX, US Shrawan Singhal - Austin TX, US Ovadia Abed - Austin TX, US Lawrence Dunn - Austin TX, US Vipul Goyal - Austin TX, US Michael Cullinan - Austin TX, US
- Austin TX, US Paras Ajay - Austin TX, US Aseem Sayal - Austin TX, US Mark McDermott - Austin TX, US Shrawan Singhal - Austin TX, US Ovadia Abed - Austin TX, US Lawrence Dunn - Austin TX, US Vipul Goyal - Austin TX, US Michael Cullinan - Austin TX, US
A method for assembling heterogeneous components. The assembly process includes using a vacuum based pickup mechanism in conjunction with sub-nm precise more alignment techniques resulting in highly accurate, parallel assembly of feedstocks.
Microscale Sensors For Direct Metrology Of Additively Manufactured Features
Sourabh SAHA - Livermore CA, US Robert PANAS - Dublin CA, US Michael A. CULLINAN - Austin TX, US Ian Seth LADNER - Picayune MS, US
International Classification:
G01N 19/08 G01B 7/16 B33Y 40/00
Abstract:
This invention relates to a microelectromechanical device for mechanical characterization of a specimen. In one embodiment the device may incorporate a substrate, at least one first flexure bearing and at least one second flexure bearing, both being supported on the substrate. First and second movable shuttles may be used which are supported above the substrate by the flexure bearings so that each is free to move linearly relative to the substrate. Ends of the movable shuttles are separated by a gap. A thermal actuator may be connected to one end of the first movable shuttle, and operates to cause the first movable shuttle to move in a direction parallel to the surface of the substrate in response to a signal applied to the thermal actuator. A first capacitive sensor may be formed between the first movable shuttle and the substrate, and a second capacitive sensor formed between the second movable shuttle and the substrate.
Rita Arlia, John Brown, J Orlando, Betty Mcgillen, Frank Fabianich, Christine Fazi, Larry Presley, Teresa Rash, Carol Tina, Josie Oliver, Rosalie Conti, John Kaczmarek