Michael H J Kang

US Patent:

7703000, Apr 20, 2010

Filed:

Feb 5, 2004

Appl. No.:

10/772848

Inventors:

John M. Barrie - Berkeley CA, US
Colin Sherman - Oakland CA, US
Michael Kang - Berkeley CA, US

Assignee:

Iparadigms LLC - Oakland CA

International Classification:

G06F 15/16

US Classification:

715230, 715248

Abstract:

The present invention relates to systems and methods for the contextual mark-up of formatted electronic documents. These systems and methods have many applications, including use for online editing and education.

US Patent:

7811409, Oct 12, 2010

Filed:

Nov 29, 2007

Appl. No.:

11/987419

Inventors:

Fred D. Egley - Sunnyvale CA, US
Michael S. Kang - San Francisco CA, US
Anthony L. Chen - Pleasanton CA, US
Jack Kuo - Pleasanton CA, US
Hong Shih - Walnut CA, US
Duane Outka - Fremont CA, US
Bruno Morel - Santa Clara CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

C23C 16/00
C23F 1/00
H01L 21/306

US Classification:

15634534, 15634533, 15634535, 118723 ME

Abstract:

Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.

US Patent:

8313635, Nov 20, 2012

Filed:

Sep 1, 2010

Appl. No.:

12/873906

Inventors:

Fred D. Egley - Sunnyvale CA, US
Michael S. Kang - San Francisco CA, US
Anthony L. Chen - Pleasanton CA, US
Jack Kuo - Pleasanton CA, US
Hong Shih - Walnut CA, US
Duane Outka - Fremont CA, US
Bruno Morel - Santa Clara CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B23H 3/00

US Classification:

205640, 205660, 205662, 205671, 205674, 205676, 205677, 205680, 205684, 205687, 205702, 205323, 205324, 205332, 205704, 205705, 216 83, 216 96, 216102

Abstract:

Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.

US Patent:

8410393, Apr 2, 2013

Filed:

May 24, 2010

Appl. No.:

12/785774

Inventors:

Anthony Ricci - Sunnyvale CA, US
Saurabh Ullal - Union City CA, US
Michael Kang - San Ramon CA, US
Matthew Busche - Santa Clara CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

B23K 37/00

US Classification:

21912154, 21912159, 118715, 118728

Abstract:

A recirculation system of a substrate support on which a semiconductor substrate is subjected to a multistep process in a vacuum chamber, the system comprising a substrate support having at least one liquid flow passage in a base plate thereof, an inlet and an outlet in fluid communication with the flow passage, a supply line in fluid communication with the inlet, and a return line in fluid communication with the outlet; a first recirculator providing liquid at temperature Tin fluid communication with the supply line and the return line; a second recirculator providing liquid at temperature Tin fluid communication with the supply line and the return line, temperature Tbeing at least 10 C. above temperature T; a pre-cooling unit providing liquid at temperature Tconnected to the inlet and the outlet, temperature Tbeing at least 10 C. below T; a pre-heating unit providing liquid at temperature Tconnected to the inlet and the outlet, temperature Tbeing at least 10 C.

US Patent:

8423886, Apr 16, 2013

Filed:

Sep 2, 2011

Appl. No.:

13/225090

Inventors:

John M. Barrie - Berkeley CA, US
Michael Kang - San Diego CA, US
Luke Chambers - Livermore CA, US
Christian Storm - Richmond CA, US
Steven Golik - Oakland CA, US
John Hartman - Oakland CA, US

Assignee:

iParadigms, LLC. - Oakland CA

International Classification:

G06F 17/00

US Classification:

715230

Abstract:

The present invention relates to systems and methods for the peer review, originality analysis, and contextual mark-up of formatted electronic documents. In particular, the present invention provides systems and methods that utilize layered peer review, originality analysis and contextual markup modules in one view. These systems and methods have many applications, including use for online editing and education.

US Patent:

8562785, Oct 22, 2013

Filed:

May 31, 2011

Appl. No.:

13/118899

Inventors:

Michael Kang - San Ramon CA, US
Alex Paterson - San Jose CA, US
Ian J. Kenworthy - Campbell CA, US

Assignee:

Lam Research Corporation - Fremont CA

International Classification:

C23C 16/505
C23C 16/507
C23C 16/455
C23F 1/00
H01L 21/306
C23C 16/06
C23C 16/22

US Classification:

15634548, 15634533, 15634534, 118723 I

Abstract:

A two piece ceramic showerhead includes upper and lower plates which deliver process gas to an inductively coupled plasma processing chamber. The upper plate overlies the lower plate and includes radially extending gas passages which extend inwardly from an outer periphery of the upper plate, axially extending gas passages in fluid communication with the radially extending gas passages and an annular recess forming a plenum between the upper and lower plates. The lower plate includes axially extending gas holes in fluid communication with the plenum. The upper plate can include eight radially extending gas passages evenly spaced around the periphery of the upper plate and the lower plate can include inner and outer rows of gas holes. The two piece ceramic showerhead forms a dielectric window of the chamber through which radiofrequency energy generated by an antenna is coupled into the chamber. A gas delivery system delivers process gas to a plenum between the upper and lower plates having a gas volume of no greater than 500 cm.

US Patent:

8589785, Nov 19, 2013

Filed:

Apr 19, 2010

Appl. No.:

12/762694

Inventors:

John M. Barrie - Berkeley CA, US
Colin Sherman - Oakland CA, US
Michael Kang - Berkeley CA, US

Assignee:

Iparadigms, LLC. - Oakland CA

International Classification:

G06F 15/16

US Classification:

715230, 715248

Abstract:

The present invention relates to systems and methods for the contextual mark-up of formatted electronic documents. These systems and methods have many applications, including use for online editing and education.

US Patent:

20050284573, Dec 29, 2005

Filed:

Jun 24, 2004

Appl. No.:

10/874566

Inventors:

Fred Egley - Sunnyvale CA, US
Michael Kang - San Francisco CA, US
Anthony Chen - Pleasanton CA, US
Jack Kuo - Pleasanton CA, US
Hong Shih - Walnut CA, US
Duane Outka - Fremont CA, US
Bruno Morel - Santa Clara CA, US

International Classification:

C23F001/00
B44C001/22

US Classification:

156345330, 216058000, 216037000

Abstract:

Bare aluminum baffles are adapted for resist stripping chambers and include an outer aluminum oxide layer, which can be a native aluminum oxide layer or a layer formed by chemically treating a new or used bare aluminum baffle to form a thin outer aluminum oxide layer.