Michael Patrick Kirk

US Patent:

6707255, Mar 16, 2004

Filed:

Jul 10, 2002

Appl. No.:

10/192196

Inventors:

David J. Coumou - Webster NY
Michael L. Kirk - Bloomfield NY

Assignee:

ENI Technology, Inc. - Rochester NY

International Classification:

B07C 1700

US Classification:

31511141, 31511121, 36447808

Abstract:

An RF generator is provided for use in an RF plasma system. The RF generator includes: a power source that is operable to generate RF power signals at a tuned frequency; a sensor unit that is adapted to detect the RF power signals and operable to generate analog signals representative of the RF power signals, where the analog signals include a frequency of interest and a plurality of interfering frequency components; and a sensor signal processing unit that is adapted to receive the analog signals from the sensor unit and to band limit the analog signals within a predefined bandwidth that passes the frequency of interest and rejects interfering frequency components.

US Patent:

6983215, Jan 3, 2006

Filed:

Dec 2, 2003

Appl. No.:

10/727081

Inventors:

David J. Coumou - Webster NY, US
Clifford C. Weatherell - Rochester NY, US
Michael L. Kirk - Bloomfield NY, US
Kevin Nasman - North Chili NY, US

Assignee:

MKS Instruments, Inc. - Andover MA

International Classification:

G01R 35/00

US Classification:

702106, 702 57, 702 60, 702 64, 702 65

Abstract:

A system for field substitution of components of a RF metrology system. The system includes a sensor/cable combination and an analysis unit. Parameters of the RF metrology system are determined prior to placing the RF metrology system in the field. From these parameters, either component, the cable/sensor combination or the analysis module, may be substituted in the field by recalibrating the system for the substituted unit. Such recalibration is carried out utilizing the parameters determined prior to placing the RF metrology system in the field.

US Patent:

20140320013, Oct 30, 2014

Filed:

Apr 10, 2014

Appl. No.:

14/249972

Inventors:

- Andover MA, US
Michael L. KIRK - Bloomfield NY, US
Daniel M. GILL - Macedon NY, US

Assignee:

MKS INSTRUMENTS, INC. - Andover MA

International Classification:

H01J 37/32

US Classification:

31511121

Abstract:

A system has a first RF generator and a second RF generator. The first RF generator controls the frequency of the second RF generator. The first RF generator includes a power source, a sensor, and a sensor signal processing unit. The sensor signal processing unit is coupled to the power source and to the sensor. The sensor signal processing unit scales the frequency of the first RF generator to control the frequency of the second RF generator.