Michael X Ma

US Patent:

6547939, Apr 15, 2003

Filed:

Mar 29, 2001

Appl. No.:

09/681402

Inventors:

Paul Hsueh - Concord CA
Shyang Chang - Hacienda CA
Hans Schiesser - Fremont CA
Michael Ma - Union City CA
Jack Hsu - San Jose CA
Abraham C. Ma - Fremont CA

Assignee:

Super Light Wave Corp. - San Jose CA

International Classification:

C23C 1434

US Classification:

20429803, 20429804, 20429811

Abstract:

A vacuum chamber deposits thin films on a substrate by sputtering a target. The beam of atoms or ions from the target is partially blocked by a shadow or adjustable uniformity mask, reducing the deposition rate onto the substrate. The adjustable uniformity mask has several adjustable fingers. The fingers extend or retract to enlarge or reduce the size of the mask. Each finger covers a different annular region or radius of the substrate. The deposition rate at different substrate radii is thus adjustable by the fingers. Several optical beams monitor the film transmittance at different substrate radii. A transmittance profile is continually generated during deposition. As deposition proceeds, radii with a thicker film have their fingers extended to reduce their deposition rate, producing a more uniform film thickness across all radii. Motors extend or retract the individual fingers.

US Patent:

20090119410, May 7, 2009

Filed:

Nov 28, 2008

Appl. No.:

12/325103

Inventors:

Jing Yang - San Ramon CA, US
Quan Wang - Beijing, CN
Michael Ma - Fremont CA, US
Meichun Zhang - Nanshan Shenzhen, CN

Assignee:

UTSTARCOM, INC. - Alameda CA

International Classification:

G06F 15/16

US Classification:

709231

Abstract:

A media content distribution system for distributed multimedia streaming communicates over a network and incorporates multiple independent media stations, each having a media director for control and a number of media engines for storage, retrieval and streaming of media content. A middleware system employing a execution engine for service platform middleware and a presentation engine for terminal middleware is provided for flexible interfacing with network transport and home network elements respectively and the IPTV applications supported.