Michael D Rice

US Patent:

6556887, Apr 29, 2003

Filed:

Jul 12, 2001

Appl. No.:

09/905091

Inventors:

Marvin L. Freeman - Round Rock TX
Jeffrey C. Hudgens - San Francisco CA
Damon Keith Cox - Round Rock TX
Chris Holt Pencis - Austin TX
Michael Rice - Pleasanton CA
David A. Van Gogh - Pasadena CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G06F 700

US Classification:

700218, 700229, 700253, 700258, 700262, 414936, 414939, 414816

Abstract:

Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot.

US Patent:

6955197, Oct 18, 2005

Filed:

Aug 28, 2003

Appl. No.:

10/650311

Inventors:

Martin R. Elliott - Round Rock TX, US
Michael R. Rice - Pleasanton CA, US
Robert B. Lowrance - Los Gatos CA, US
Jeffrey C. Hudgens - San Francisco CA, US
Eric A. Englhardt - Palo Alto CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65B001/04

US Classification:

141 98, 141 93, 414217, 414331, 414940

Abstract:

In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.

US Patent:

7039501, May 2, 2006

Filed:

Apr 3, 2003

Appl. No.:

10/406644

Inventors:

Marvin L. Freeman - Round Rock TX, US
Jeffrey C. Hudgens - San Francisco CA, US
Damon Keith Cox - Round Rock TX, US
Chris Holt Pencis - Austin TX, US
Michael Rice - Pleasanton CA, US
David A. Van Gogh - Pasadena CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G05B 15/00
G05B 19/00

US Classification:

700258, 700218, 700229, 700245, 700253, 700262, 318640, 31856816, 414806, 414217, 414936, 414937, 414393, 20419212, 20429835, 20429815, 20429825, 20429826

Abstract:

Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot.

US Patent:

7085622, Aug 1, 2006

Filed:

Apr 19, 2002

Appl. No.:

10/126493

Inventors:

Iraj Sadighi - Round Rock TX, US
Jeff Hudgens - San Francisco CA, US
Michael Rice - Pleasanton CA, US
Gary Wyka - Austin TX, US

Assignee:

Applied Material, Inc. - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700245, 700258, 348 86, 348 87, 348 94, 31856816, 318625, 25055945

Abstract:

Generally a method and apparatus for viewing images within a processing system is provided. In one embodiment, an apparatus includes a plate having a camera, transmitter and battery coupled thereto. The plate is adapted to be transported about a semiconductor processing system by a substrate transfer robot thereby allowing images within the system to be viewed remotely from the system. The viewed images may be used for system inspection and calibration of robot position, among other uses.

US Patent:

7233841, Jun 19, 2007

Filed:

Mar 11, 2003

Appl. No.:

10/387267

Inventors:

Iraj Sadighi - Round Rock TX, US
Jeff Hudgens - San Francisco CA, US
Michael Rice - Pleasanton CA, US
Gary Wyka - Austin TX, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

G06F 19/00

US Classification:

700245, 700258, 348 86, 348 87, 348 94, 31856816, 318625, 25055945

Abstract:

A vision system and method for calibrating motion of a robot disposed in a processing system is provided. In one embodiment, a vision system for a processing system includes a camera and a calibration wafer that are positioned in a processing system. The camera is positioned on the robot and is adapted to obtain image data of the calibration wafer disposed in a predefined location within the processing system. The image data is utilized to calibrate the robots motion.

US Patent:

7258520, Aug 21, 2007

Filed:

Aug 28, 2003

Appl. No.:

10/650312

Inventors:

Martin R. Elliott - Round Rock TX, US
Michael Robert Rice - Pleasanton CA, US
Robert B. Lowrance - Los Gatos CA, US
Jeffrey C. Hudgens - San Francisco CA, US
Eric Andrew Englhardt - Palo Alto CA, US
Loy Randall Stuart - Austin TX, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65B 59/00
H01L 21/67

US Classification:

414217, 414411, 414939

Abstract:

A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.

US Patent:

7299831, Nov 27, 2007

Filed:

Aug 23, 2005

Appl. No.:

11/210199

Inventors:

Martin R. Elliott - Round Rock TX, US
Michael R. Rice - Pleasanton CA, US
Robert B. Lowrance - Los Gatos CA, US
Jeffrey C. Hudgens - San Francisco CA, US
Eric A. Englhardt - Palo Alto CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65B 1/04

US Classification:

141 98, 141 93, 414217, 414331, 414940

Abstract:

In a first aspect, an automatic door opener is provided that includes (1) a platform adapted to support a substrate carrier; (2) a door opening mechanism adapted to open a door of the substrate carrier while the substrate carrier is supported by the platform; and (3) a tunnel. The tunnel is adapted to extend from an opening in a clean room wall toward the platform and at least partially surround the platform. The tunnel is further adapted to direct a flow of air from the clean room wall toward the platform and out of the tunnel. Numerous other aspects are provided.

US Patent:

7578647, Aug 25, 2009

Filed:

Feb 4, 2005

Appl. No.:

11/051504

Inventors:

Martin R. Elliott - Round Rock TX, US
Michael R. Rice - Pleasanton CA, US
Jeffrey C. Hudgens - San Francisco CA, US
Eric A. Englhardt - Palo Alto CA, US
Victor Belitsky - Sunnyvale CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

B65G 65/34

US Classification:

414411, 414937

Abstract:

In a first aspect, an apparatus is provided for opening a substrate carrier door of a substrate carrier. The apparatus includes a supporting member adapted to (1) support the substrate carrier door at a load port; (2) allow removal of the door from the substrate carrier; and (3) pivot the removed door below a bottom surface of the substrate carrier. Numerous other aspects are provided.