Michael O Starr

US Patent:

7429410, Sep 30, 2008

Filed:

Jul 25, 2005

Appl. No.:

11/188922

Inventors:

Ernst Keller - Sunnyvale CA, US
John M. White - Hayward CA, US
Robin L. Tiner - Santa Cruz CA, US
Jiri Kucera - Cupertino CA, US
Soo Young Choi - Fremont CA, US
Beom Soo Park - San Jose CA, US
Michael Starr - San Jose CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

H05H 1/24

US Classification:

427578

Abstract:

An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gasses through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.

US Patent:

8075690, Dec 13, 2011

Filed:

Sep 19, 2008

Appl. No.:

12/234359

Inventors:

Ernst Keller - Sunnyvale CA, US
John M. White - Hayward CA, US
Robin L. Tiner - Santa Cruz CA, US
Jiri Kucera - Cupertino CA, US
Soo Young Choi - Fremont CA, US
Beom Soo Park - San Jose CA, US
Michael Starr - San Jose CA, US

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 16/455
C23F 1/00
H01L 21/306
C23C 16/06
C23C 16/22

US Classification:

118715, 15634533, 15634534

Abstract:

An apparatus and method for supporting a substantial center portion of a gas distribution plate is disclosed. At least one support member is capable of engaging and disengaging the diffuser with a mating connection without prohibiting flow of a gas or gases through the diffuser and is designed to provide vertical suspension to a diffuser that is supported at its perimeter, or capable of supporting the diffuser without a perimeter support. In one aspect, the at least one support member is a portion of a gas delivery conduit and in another embodiment is a plurality of support members separated from the gas delivery conduit. The at least one support member is capable of translating vertical lift, or vertical compression to a center area of the diffuser. A method and apparatus for controlling gas flow from the gas delivery conduit to the gas distribution plate is also disclosed.