Ming Yue Li

US Patent:

6433305, Aug 13, 2002

Filed:

Dec 26, 2000

Appl. No.:

09/747682

Inventors:

Xinbing Liu - Acton MA
Ming Li - Storrs CT

Assignee:

Matsushita Electric Industries Co., Ltd. - Osaka

International Classification:

B23K 2602

US Classification:

21912171, 21912169

Abstract:

A method of laser machining using an ultra-fast pulse laser is presented. According to the present invention a plurality of holes with a pitch less than the wavelength of the laser are drilled into a material sample. Reliable and reproducible hole drilling is accomplished through an exemplary drilling sequence which applies a number of pulses at a first pulse energy to the surface spaced to avoid laser hardening of the surface for adjacent holes of a first set of holes. Next, the number of pulses is increased or the energy of the laser beam is increased to drill holes that are interstitial to the first set of holes. The exemplary laser machining process may used to produce both one-dimensional and two-dimensional photonic crystals, among other applications.

US Patent:

6570122, May 27, 2003

Filed:

Jan 3, 2002

Appl. No.:

10/038330

Inventors:

Xinbing Liu - Acton MA
Ming Li - Storrs CT

Assignee:

Matsushita Electric Industrial Co., Ltd. - Osaka

International Classification:

B23K 2638

US Classification:

21912171

Abstract:

A method of laser machining using an ultra-fast pulse laser is presented. According to the present invention a plurality of holes with a pitch less than the wavelength of the laser are drilled into a material sample. Reliable and reproducible hole drilling is accomplished through an exemplary drilling sequence which applies a number of pulses at a first pulse energy to the surface spaced to avoid laser hardening of the surface for adjacent holes of a first set of holes. Next, the number of pulses is increased or the energy of the laser beam is increased to drill holes that are interstitial to the first set of holes. The exemplary laser machining process may used to produce both one-dimensional and two-dimensional photonic crystals, among other applications.

US Patent:

6621045, Sep 16, 2003

Filed:

Oct 8, 2002

Appl. No.:

10/266936

Inventors:

Xinbing Liu - Acton MA
Ming Li - Chelmsford MA
Chen-Hsiung Cheng - Chelmsford MA

Assignee:

Matsushita Electric Industrial Co., Ltd. - Osaka

International Classification:

B23K 2638

US Classification:

2191217

Abstract:

A method is provided for maintaining a workpiece in a focal plane of a laser drilling system. The method includes: providing a workpiece holder that is adapted to releasably retain a workpiece on a planar surface thereof, the planar surface having a recess extending therein; positioning the workpiece onto a planar surface of a workpiece holder, such that the workpiece extends across the recess formed in the workpiece holder and an exposed surface of the workpiece aligns with a focal plane of a laser drilling system; projecting a laser beam from the laser drilling system onto the exposed surface of the workpiece, thereby forming an ablation on the exposed surface of the workpiece; and directing a flow of gas onto the exposed surface of the workpiece substantially concurrent with the step of projecting a laser beam, such that the flow of gas substantially impinges on an area of the exposed surface that extends across the recess formed in the workpiece holder, thereby maintaining the exposed surface of the workpiece in the focal plane of the laser drilling system during the laser drilling operation.

US Patent:

6710288, Mar 23, 2004

Filed:

Oct 8, 2002

Appl. No.:

10/266944

Inventors:

Xinbing Liu - Acton MA
Ming Li - Chelmsford MA

Assignee:

Matsushita Electric Industrial Co., Ltd. - Osaka

International Classification:

B23K 2603

US Classification:

2191217

Abstract:

A method is provided for aligning a workpiece in a laser drilling system. The method includes: providing a workpiece having at least two substantially planar and parallel surfaces, including a first planar surface in which ablations are formed therein by the laser drilling system; propagating an alignment beam of light towards a second planar surface of the workpiece, the alignment beam being incident on and reflected by the second planar surface, thereby forming a reflected beam of light; measuring a reflection angle of the reflected beam; and determining alignment information for the workpiece based on the measured reflection angle of the reflected beam. The method may further include adjusting alignment of the workpiece based on the alignment information.

US Patent:

6819837, Nov 16, 2004

Filed:

Mar 25, 2003

Appl. No.:

10/396030

Inventors:

Ming Li - Chelmsford MA
Daniel Hogan - Acton MA
Xinbing Liu - Acton MA
Makoto Ishizuka - Belmont MA

Assignee:

Matsushita Electric Industrial Co., Ltd. - Osaka

International Classification:

G02B 626

US Classification:

385 39, 385 24, 372 20, 372 28, 372 94

Abstract:

A tuned optical resonator having a substrate and an input waveguide and an optical resonator waveguide formed on the substrate. The optical resonator waveguide has a resonant frequency, exhibits a first index of refraction, temporarily exhibits a second index of refraction responsive to application of laser energy, and temporarily resonates at the resonant frequency while the laser energy is being applied.

US Patent:

6898358, May 24, 2005

Filed:

Dec 24, 2002

Appl. No.:

10/328841

Inventors:

Ming Li - Chelmsford MA, US
Makoto Ishizuka - Belmont MA, US
Daniel Hogan - Acton MA, US
Xinbing Liu - Acton MA, US

Assignee:

Matsushita Electric Industrial Co., Ltd. - Osaka

International Classification:

G02B006/00
H04J014/02

US Classification:

385122, 385129, 385130, 385131, 398 79, 398 82

Abstract:

A photonic crystal comprising a waveguide made of material. The waveguide has a periodic set of holes. The material proximate to at least one of the holes in the periodic set of holes exhibits an index of refraction that has been modified by the application of laser energy relative to the material proximate to other holes in the periodic set of holes. The photonic crystal is tuned to temporarily transmit a specific wavelength of light to create an on-off switch for the specific wavelength. Multiple photonic crystals are used to form a multiplexer and a demultiplexer.

US Patent:

6947649, Sep 20, 2005

Filed:

Dec 24, 2002

Appl. No.:

10/329186

Inventors:

Ming Li - Chelmsford MA, US
Makoto Ishizuka - Belmont MA, US
Xinbing Liu - Acton MA, US
Daniel Hogan - Acton MA, US

Assignee:

Matsushita Electric Industrial Co., Ltd. - Osaka

International Classification:

G02B006/00
H04J014/08

US Classification:

385122, 385129, 385130, 385131, 385132, 385141, 385 14, 398 98, 398101, 398102

Abstract:

A photonic crystal comprising a waveguide made of material. The waveguide has a periodic set of holes. The material proximate to at least one of the holes in the periodic set of holes exhibits an index of refraction that has been modified by the application of laser energy relative to the material proximate to other holes in the periodic set of holes.

US Patent:

6951627, Oct 4, 2005

Filed:

Dec 24, 2002

Appl. No.:

10/329036

Inventors:

Ming Li - Chelmsford MA, US
Makoto Ishizuka - Belmont MA, US
Xinbing Liu - Acton MA, US

Assignee:

Matsushita Electric Industrial Co., Ltd. - Osaka

International Classification:

B23K026/03
B23K026/06

US Classification:

264400, 21912167, 21912171, 21912174, 21912175, 21912183, 21912185

Abstract:

The invention is an apparatus and a method for drilling holes in a work piece with a laser. A laser beam is received by the optical system and directed along an optical path. The system directs the laser beam through a moveable mask aperture creating a sub-beam, that is reduced in size by a lens system as it is imaged onto a work piece. Multiple features are formed in the work piece by moving the mask.