Ming Li

US Patent:

20020150842, Oct 17, 2002

Filed:

Apr 11, 2001

Appl. No.:

09/829974

Inventors:

Ming Li - Thousand Oaks CA, US

Assignee:

Solus Micro Technologies, Inc.

International Classification:

G03F007/00

US Classification:

430/323000, 430/327000

Abstract:

Elastomer thin films can be lithographically patterned by using an UV curable polydimethylsiloxane, rather than replica molding of thermal cure elastomers. The fabrication method of such patterned elastomers consists of elastomer formulation, substrate modification, spinning elastomer, pattern development, and possible a backside etch of the substrate.

US Patent:

20120265481, Oct 18, 2012

Filed:

Apr 13, 2011

Appl. No.:

13/085900

Inventors:

ROBERT E. STEWART - Woodland Hills CA, US
Daryl Sakaida - Simi Valley CA, US
Michael D. Bulatowicz - Canoga Park CA, US
Ming Li - Camarillo CA, US
John Thomson Douglass - Woodland Hills CA, US

International Classification:

G01P 15/00

US Classification:

702141

Abstract:

An accelerometer system can include a sensor element comprising first and second proofmasses, the first proofmass accelerating in a first direction and the second proofmass accelerating in a second direction opposite the first direction in response to an external acceleration. A force rebalance controller applies control signals to at least one control element to provide a first force to accelerate the first proofmass toward a first null position and to at least one control element to provide a second force to accelerate the second proofmass toward a second null position. The force rebalance controller can also generate opposite polarity first and second output signals associated with respective displacements of the first and second proofmasses relative to the respective first and second null positions. An acceleration component calculates the external acceleration based on the first and second output signals.