Mitchell A Taylor

US Patent:

20090142875, Jun 4, 2009

Filed:

Nov 30, 2007

Appl. No.:

11/948630

Inventors:

Peter Borden - San Mateo CA, US
Mitchell C. Taylor - Lake Oswego OR, US

Assignee:

APPLIED MATERIALS, INC. - Santa Clara CA

International Classification:

H01L 31/18
H01L 21/26

US Classification:

438 69, 438513, 257E21328, 257E31001

Abstract:

A method for forming a selective emitter on a silicon solar cell is provided including forming an oxide layer on a surface of the P-type silicon substrate, implanting phosphorus doping atoms into the oxide layer on the substrate using plasma immersion ion implantation, patterning the oxide layer, annealing the substrate to provide heavily doped regions in the patterned regions and a lightly doped region between the patterned regions, and providing metal contacts to the heavily doped regions.

US Patent:

59328827, Aug 3, 1999

Filed:

Sep 8, 1997

Appl. No.:

8/860749

Inventors:

Jonathan Gerald England - Horsham, GB
Babak Adibi - Santa Clara CA
Mitchell C. Taylor - Lake Oswego OR

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

H01J 37317

US Classification:

25049221

Abstract:

A decel lens assembly (9) located between the mass selection flight tube and the substrate holder comprises a first electrode (65) at the substrate potential, a second electrode (60) at the flight tube potential and a field electrode (61) between the two at a negative potential to provide focusing. The axial spacing in the beam direction between the first and second electrodes is less than the smallest transverse dimension of the field electrode. The decel lens assembly (9) is mounted directly opposite the outlet from the process chamber to the vacuum pump to maximize evacuation efficiency. An additional screening electrode (56) is provided between the second electrode of the decel lens assembly and the exit aperture of the mass selector. A perforated screening cylinder (54) is mounted on the light tube with the second electrode of the lens assembly mounted at the down beam end of the cylinder. A first electrode has a cylindrical screening flange extending around the field electrode.