Nicolas J Bright

US Patent:

20220213959, Jul 7, 2022

Filed:

Mar 23, 2022

Appl. No.:

17/656030

Inventors:

- Santa Clara CA, US
Nicolas J. BRIGHT - Arlington WA, US
Andrew NGUYEN - San Jose CA, US

International Classification:

F16J 10/02
H01J 37/32

Abstract:

An apparatus for processing a substrate is disclosed and includes, in one embodiment, a twin chamber housing having two openings formed therethrough, a first pump interface member coaxially aligned with one of the two openings formed in the twin chamber housing, and a second pump interface member coaxially aligned with another of the two openings formed in the twin chamber housing, wherein each of the pump interface members include three channels that are concentric with a centerline of the two openings.