Olga V Mikulina

US Patent:

20080188990, Aug 7, 2008

Filed:

Apr 1, 2008

Appl. No.:

12/080368

Inventors:

Norbert W. Elsdoerfer - Warwick RI, US
Olga V. Mikulina - Wayland MA, US
Abdellah Mourchid - East Boston MA, US

Assignee:

Temptronic Corporation - Sharon MA

International Classification:

G05B 13/00

US Classification:

700278

Abstract:

An apparatus and method of controlling the temperature of a thermal chuck system are disclosed. The system includes a temperature controller which controls a temperature transition in a thermal chuck. The temperature controller comprises inputs that receive air and fluid from an air source and water source, respectively, and an output for alternately transferring the air and fluid in proportions to the thermal chuck. A time proportional controller generates the proportions by computing a proportion band in each of a plurality of control regions. The proportion bands are used by the temperature controller to manage the flow of air and fluid to the chuck such that a minimum undershoot of the temperature transition is realized.

US Patent:

20080231304, Sep 25, 2008

Filed:

Apr 1, 2008

Appl. No.:

12/080392

Inventors:

Norbert W. Elsdoerfer - Warwick RI, US
Olga V. Mikulina - Wayland MA, US
Abdellah Mourchid - East Boston MA, US

Assignee:

Temptronic Corporation - Sharon MA

International Classification:

G01R 31/302

US Classification:

324760

Abstract:

An apparatus and method of controlling the temperature of a thermal chuck system are disclosed. The system includes a temperature controller which controls a temperature transition in a thermal chuck. The temperature controller comprises inputs that receive air and fluid from an air source and water source, respectively, and an output for alternately transferring the air and fluid in proportions to the thermal chuck. A time proportional controller generates the proportions by computing a proportion band in each of a plurality of control regions. The proportion bands are used by the temperature controller to manage the flow of air and fluid to the chuck such that a minimum undershoot of the temperature transition is realized.

US Patent:

20060196653, Sep 7, 2006

Filed:

Feb 27, 2006

Appl. No.:

11/363358

Inventors:

Norbert Elsdoerfer - Warwick RI, US
Olga Mikulina - Wayland MA, US
Abdellah Mourchid - East Boston MA, US

International Classification:

F24F 3/00

US Classification:

165206000

Abstract:

An apparatus and method of controlling the temperature of a thermal chuck system are disclosed. The system includes a temperature controller which controls a temperature transition in a thermal chuck. The temperature controller comprises inputs that receive air and fluid from an air source and water source, respectively, and an output for alternately transferring the air and fluid in proportions to the thermal chuck. A time proportional controller generates the proportions by computing a proportion band in each of a plurality of control regions. The proportion bands are used by the temperature controller to manage the flow of air and fluid to the chuck such that a minimum undershoot of the temperature transition is realized.