Pamela M Patterson

US Patent:

54784557, Dec 26, 1995

Filed:

Sep 17, 1993

Appl. No.:

8/123759

Inventors:

Geri M. Actor - Monte Sereno CA
Stephen M. Higa - San Jose CA
Vance E. Hoffman - Los Altos CA
Patrick O. Miller - Mountain View CA
Pamela R. Patterson - Palo Alto CA

Assignee:

Varian Associates, Inc. - Palo Alto CA

International Classification:

C23C 1454

US Classification:

20419213

Abstract:

A method for automatically controlling a collimated sputtering source that is controllable by a computer to compensate for the build-up of sputtered material on the collimator. The method involves providing software for the computer including a formula to calculate a multiplier as a function of the age of the collimator, sequentially depositing film on a series of substrates using the sputtering source, monitoring the age of the collimator, and using the software to periodically adjust the value of a controllable sputtering parameter as a function of the multiplier. The sputtering parameter is automatically adjusted by the software such that a property of the film deposited by the source on the series of substrates does not substantially vary among the substrates as sputtered material builds up on the collimator.