Patrick P Chu

US Patent:

6480645, Nov 12, 2002

Filed:

Jan 30, 2001

Appl. No.:

09/772084

Inventors:

David R. Peale - Tinton Falls NJ
Patrick Breckow Chu - Middletown NJ
Sangtae Park - Middletown NJ
Nicolas H. Bonadeo - Aberdeen NJ
Shi-Sheng Lee - Middletown NJ
Ming-Ju Tsai - Livingston NJ

Assignee:

Tellium, Inc. - Oceanport NJ

International Classification:

G02B 626

US Classification:

385 18, 385 16, 385 17, 359224

Abstract:

A structure and method for an optical switch is provided that includes providing sidewall electrodes with steerable micro-mirrors to position and control micro-mirror movement. The structure and method includes using the sidewall electrodes in conjunction with electrodes underlying a micro-mirror to sense capacitance present between a micro-mirror and underlying electrodes and/or sidewall electrodes, and driving the electrodes underlying the micro-mirror and the sidewall electrodes to move the micro-mirror into an angular position. The electrode structures and methods of driving them may be used in systems with closed loop feedback control to reduce transient mirror settling time and provide substantial immunity to system perturbations when micro-mirrors switch an optical signal from an input fiber to an output fiber of the optical switch, or when a micro-mirror is held at an angular position over long time scales.