Paul Chang

US Patent:

8084308, Dec 27, 2011

Filed:

May 21, 2009

Appl. No.:

12/470128

Inventors:

Josephine Chang - Yorktown Heights NY, US
Paul Chang - Hopewell Junction NY, US
Michael A. Guillorn - Yorktown Heights NY, US
Jeffrey Sleight - Yorktown Heights NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 21/00
H01L 21/84
H01L 27/148
H01L 27/105

US Classification:

438151, 257 24, 257250, 257251, 257274, 257369, 257E21632, 257E21633, 257E21634, 257E21641, 257E27064, 977762, 977938

Abstract:

Nanowire-based devices are provided. In one aspect, a field-effect transistor (FET) inverter is provided. The FET inverter includes a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region, wherein the source and drain regions of one or more of the device layers are doped with an n-type dopant and the source and drain regions of one or more other of the device layers are doped with a p-type dopant; a gate common to each of the device layers surrounding the nanowire channels; a first contact to the source regions of the one or more device layers doped with an n-type dopant; a second contact to the source regions of the one or more device layers doped with a p-type dopant; and a third contact common to the drain regions of each of the device layers. Techniques for fabricating a FET inverter are also provided.

US Patent:

8216902, Jul 10, 2012

Filed:

Aug 6, 2009

Appl. No.:

12/536741

Inventors:

Josephine Chang - Yorktown Heights NY, US
Paul Chang - Hopewell Junction NY, US
Michael A. Guillorn - Yorktown Heights NY, US
Jeffrey Sleight - Yorktown Heights NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 21/8234

US Classification:

438275, 257E21645, 977938

Abstract:

Nanowire-based devices are provided. In one aspect, a SRAM cell includes at least one pair of pass gates and at least one pair of inverters formed adjacent to one another on a wafer. Each pass gate includes one or more device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the pass gate device layers surrounding the nanowire channels. Each inverter includes a plurality of device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the inverter device layers surrounding the nanowire channels.

US Patent:

8395220, Mar 12, 2013

Filed:

Mar 12, 2012

Appl. No.:

13/417829

Inventors:

Josephine Chang - Mahopac NY, US
Paul Chang - Mahopac NY, US
Michael A. Guillorn - Yorktown Heights NY, US
Jeffrey Sleight - Ridgefield CT, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 27/088
B82Y 99/00

US Classification:

257368, 257E2706, 977938

Abstract:

Nanowire-based devices are provided. In one aspect, a SRAM cell includes at least one pair of pass gates and at least one pair of inverters formed adjacent to one another on a wafer. Each pass gate includes one or more device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the pass gate device layers surrounding the nanowire channels. Each inverter includes a plurality of device layers each having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region and a gate common to each of the inverter device layers surrounding the nanowire channels.

US Patent:

8422273, Apr 16, 2013

Filed:

May 21, 2009

Appl. No.:

12/470159

Inventors:

Josephine Chang - Yorktown Heights NY, US
Paul Chang - Hopewell Junction NY, US
Michael A. Guillorn - Yorktown Heights NY, US
Jeffrey Sleight - Yorktown Heights NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G11C 11/00

US Classification:

365151, 365157, 365164, 257 24, 977943

Abstract:

Nanowire-based field-effect transistors (FETs) and techniques for the fabrication thereof are provided. In one aspect, a FET is provided having a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region, wherein one or more of the device layers are configured to have a different threshold voltage from one or more other of the device layers; and a gate common to each of the device layers surrounding the nanowire channels.

US Patent:

8466451, Jun 18, 2013

Filed:

Dec 11, 2011

Appl. No.:

13/316515

Inventors:

Josephine Chang - Mahopac NY, US
Paul Chang - Mahopac NY, US
Michael A. Guillorn - Yorktown Heights NY, US
Jeffrey Sleight - Ridgefield CT, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 29/06
H01L 31/00
H01L 27/105
H01L 27/148

US Classification:

257 24, 257250, 257251, 257274, 257369, 257E21641, 257E27064, 977938

Abstract:

A FET inverter is provided that includes a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels, wherein the source and drain regions of one or more of the device layers are doped with an n-type dopant and the source and drain regions of one or more other of the device layers are doped with a p-type dopant; a gate common to each of the device layers surrounding the nanowire channels; a first contact to the source regions of the one or more device layers doped with an n-type dopant; a second contact to the source regions of the one or more device layers doped with a p-type dopant; and a third contact common to the drain regions of each of the device layers. Techniques for fabricating a FET inverter are also provided.

US Patent:

8472239, Jun 25, 2013

Filed:

May 9, 2012

Appl. No.:

13/467126

Inventors:

Josephine Chang - Mahopac NY, US
Paul Chang - Mahopac NY, US
Michael A. Guillorn - Yorktown Heights NY, US
Jeffrey Sleight - Ridgefield CT, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

G11C 11/00

US Classification:

365151, 365157, 365164, 257 24, 977943

Abstract:

Nanowire-based field-effect transistors (FETs) and techniques for the fabrication thereof are provided. In one aspect, a FET is provided having a plurality of device layers oriented vertically in a stack, each device layer having a source region, a drain region and a plurality of nanowire channels connecting the source region and the drain region, wherein one or more of the device layers are configured to have a different threshold voltage from one or more other of the device layers; and a gate common to each of the device layers surrounding the nanowire channels.

US Patent:

8492748, Jul 23, 2013

Filed:

Jun 27, 2011

Appl. No.:

13/169542

Inventors:

Josephine B. Chang - Mahopac NY, US
Paul Chang - Mahopac NY, US
Michael A. Guillorn - Yorktown Heights NY, US
Philip S. Waggoner - Fishkill NY, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 29/06
H01L 31/00
H01L 29/15
H01L 51/40

US Classification:

257 29, 257 20, 257 77, 438 99

Abstract:

A disposable material layer is first deposited on a graphene layer or a carbon nanotube (CNT). The disposable material layer includes a material that is less inert than graphene or CNT so that a contiguous dielectric material layer can be deposited at a target dielectric thickness without pinholes therein. A gate stack is formed by patterning the contiguous dielectric material layer and a gate conductor layer deposited thereupon. The disposable material layer shields and protects the graphene layer or the CNT during formation of the gate stack. The disposable material layer is then removed by a selective etch, releasing a free-standing gate structure. The free-standing gate structure is collapsed onto the graphene layer or the CNT below at the end of the selective etch so that the bottom surface of the contiguous dielectric material layer contacts an upper surface of the graphene layer or the CNT.

US Patent:

8513099, Aug 20, 2013

Filed:

Jun 17, 2010

Appl. No.:

12/817733

Inventors:

Josephine B. Chang - Mahopac NY, US
Paul Chang - Mahopac NY, US
Vijay Narayanan - New York NY, US
Jeffrey W. Sleight - Ridgefield CT, US

Assignee:

International Business Machines Corporation - Armonk NY

International Classification:

H01L 21/20
H01L 21/36

US Classification:

438478, 977742, 977938, 257E5104

Abstract:

A method of forming a self-aligned device is provided and includes depositing carbon nanotubes (CNTs) onto a crystalline dielectric substrate, isolating a portion of the crystalline dielectric substrate encompassing a location of the CNTs, forming gate dielectric and gate electrode gate stacks on the CNTs while maintaining a structural integrity thereof and forming epitaxial source and drain regions in contact with portions of the CNTs on the crystalline dielectric substrate that are exposed from the gate dielectric and gate electrode gate stacks.