Paul D Lewis

US Patent:

6393334, May 21, 2002

Filed:

Sep 17, 1999

Appl. No.:

09/397996

Inventors:

Paul E. Lewis - San Jose CA
Adel George Tannous - Santa Clara CA
Karl A. Davlin - Hayward CA

Assignee:

Honeywell International Inc. - Morristown NJ

International Classification:

G06F 1900

US Classification:

700117, 700121

Abstract:

A method and apparatus for automated interfacing with a processing tool in a manufacturing environment having a tilt mechanism and a rotation mechanism. In one embodiment, semiconductor wafers in a cassette are presented to a processing tool by tilting the cassette during movement towards the tool. The tilt mechanism provides a means for seating the wafers in the cassette. The rotation mechanism allows the cassette to be adjusted to meet a robotic arm which extracts wafers from the cassette. Where the cassette is part of a Standard Mechanical InterFace (SMIF) system, the pod is placed onto the interface apparatus, where the pod cover is removed to allow processing of the wafers. A bellows is provided to cover the exposed cassette, thus creating an extended mini-environment including the interface apparatus, tool, and pod cover. In one embodiment, the interface apparatus includes robotic arms and a lift mechanism. Operation of the lift mechanism to open a container effects the positioning of the robotic arms to transfer the container to the tool.

US Patent:

6418979, Jul 16, 2002

Filed:

Sep 17, 1999

Appl. No.:

09/397475

Inventors:

Paul E. Lewis - San Jose CA
Adel George Tannous - Santa Clara CA
Karl A. Davlin - Hayward CA

Assignee:

Mid-America Commercialization Corporation - Manhattan KS

International Classification:

B65B 3100

US Classification:

141 4, 4 63, 4 64

Abstract:

A method and apparatus for automated interfacing with a processing tool in a manufacturing environment having a tilt mechanism and a rotation mechanism. In one embodiment, semiconductor wafers in a cassette are presented to a processing tool by tilting the cassette during movement towards the tool. The tilt mechanism provides a means for seating the wafers in the cassette. The rotation mechanism allows the cassette to be adjusted to meet a robotic arm which extracts wafers from the cassette. Where the cassette is part of a Standard Mechanical InterFace (SMIF) system, the pod is placed onto the interface apparatus, where the pod cover is removed to allow processing of the wafers. A bellows is provided to cover the exposed cassette, thus creating an extended mini-environment including the interface apparatus, tool, and pod cover. In one embodiment, the interface apparatus includes robotic arms and a lift mechanism. Operation of the lift mechanism to open a container effects the positioning of the robotic arms to transfer the container to the tool.

US Patent:

6427096, Jul 30, 2002

Filed:

Feb 12, 1999

Appl. No.:

09/249752

Inventors:

Paul E. Lewis - San Jose CA
Adel George Tannous - Santa Clara CA
Karl A. Davlin - Hayward CA
Khalid Makhamreh - Santa Clara CA

Assignee:

Honeywell International Inc. - Morristown NJ

International Classification:

G06F 700

US Classification:

700228, 700229, 414222

Abstract:

A method and apparatus for automated interfacing with a processing tool in a manufacturing environment having a tilt mechanism and a rotation mechanism. In one embodiment, semiconductor wafers in a cassette are presented to a processing tool by tilting the cassette during movement towards the tool. The tilt mechanism provides a means for seating the wafers in the cassette. The rotation mechanism allows the cassette to be adjusted to meet a robotic arm which extracts wafers from the cassette. Where the cassette is part of a Standard Mechanical InterFace (SMIF) system, the pod is placed onto the interface apparatus, where the pod cover is removed to allow processing of the wafers. A bellows is provided to cover the exposed cassette, thus creating an extended mini-environment including the interface apparatus, tool, and pod cover. In one embodiment, the interface apparatus includes robotic arms and a lift mechanism. Operation of the lift mechanism to open a container effects the positioning of the robotic arms to transfer the container to the tool.

US Patent:

6528117, Mar 4, 2003

Filed:

Jan 19, 2001

Appl. No.:

09/766114

Inventors:

Paul E. Lewis - San Jose CA

Assignee:

Paul Lewis - San Jose CA
Alan Loudermilk - Chicago IL

International Classification:

B05D 126

US Classification:

427256, 4274301, 4274343

Abstract:

A system for applying a thin coat of a material on one side only of a substrate is disclosed together with a process for applying the thin coat. Coatings of less than one thousand angstroms are attainable on a single surface of the substrate by controlling the speed at which a meniscus of a mix containing a predetermined concentration of the coating material travels across the single surface being coated. Various pressure, temperature and humidity controls are implemented in the process and by the apparatus as needed to obtain the desired coating characteristics.

US Patent:

6543462, Apr 8, 2003

Filed:

Aug 10, 2000

Appl. No.:

09/637333

Inventors:

Paul E. Lewis - San Jose CA
Goodarz Ahmadi - Potsdam NY
Adel George Tannous - Santa Clara CA
Khalid Makhamreh - Santa Clara CA
Keith H. Compton - San Jose CA

Assignee:

Nano Clean Technologies, Inc. - San Jose CA

International Classification:

B08B 302

US Classification:

134144, 134151, 134181, 134902, 239242, 451 39, 451102

Abstract:

A cryogenic cleaner for and a method of performing cleaning of a surface that must be substantially free of contaminants has a resiliently mounted nozzle for spraying a cryogenic cleaning medium on the surface. The nozzle is driven in an oscillatory manner at a predetermined amplitude and frequency so the nozzle spray is delivered in a manner to provide pulsing of the spray and to provide as âsnow plowâ effect on contaminants as the spray delivers the cleaning medium against the surface. The surface is transported past the nozzle, and the cleaning occurs in an enclosed controlled environment.

US Patent:

6805900, Oct 19, 2004

Filed:

Mar 3, 2003

Appl. No.:

10/378191

Inventors:

Paul E. Lewis - San Jose CA

Assignee:

Paul Lewis - San Jose CA
Alan Loudermilk - Chicago IL

International Classification:

B05D 126

US Classification:

427 96, 427 58, 427162, 427256, 4274301, 4274343

Abstract:

A system for applying a thin coat of a material on one side only of a substrate is disclosed together with a process for applying the thin coat. Coatings of less than one thousand angstroms are attainable on a single surface of the substrate by controlling the speed at which a meniscus of a mix containing a predetermined concentration of the to coating material travels across the single surface being coated. Various pressure, temperature and humidity controls are implemented in the process and by the apparatus as needed to obtain the desired coating characteristics.

US Patent:

7556694, Jul 7, 2009

Filed:

Oct 18, 2004

Appl. No.:

10/968550

Inventors:

Paul E. Lewis - San Jose CA, US

International Classification:

B05C 3/00

US Classification:

118423, 118DIG 2

Abstract:

A system for applying a thin coat of a material on one side only of a substrate is disclosed together with a process for applying the thin coat. Coatings of less than one thousand angstroms are attainable on a single surface of the substrate by controlling the speed at which a meniscus of a mix containing a predetermined concentration of the coating material travels across the single surface being coated. Various pressure, temperature and humidity controls are implemented in the process and by the apparatus as needed to obtain the desired coating characteristics.

US Patent:

61960012, Mar 6, 2001

Filed:

Oct 12, 1999

Appl. No.:

9/417257

Inventors:

Adel G. Tannous - Santa Clara CA
Paul E. Lewis - San Jose CA

Assignee:

AlliedSignal Inc. - Morristown NJ

International Classification:

F25B 2102

US Classification:

62 361

Abstract:

A transportable cart assembly is described which controls various environmental conditions within an enclosure while transporting items such as semiconductor wafers or flat panel displays. A fan and filter unit is used to control the spread of small particles within the cart and a heating and cooling unit, such as a thermoelectric heater, is used to control the temperature within the enclosure. The fan and filter unit works in conjunction with the heating and cooling unit in a single-pass flow or recirculating cycle to maintain the temperatures within the enclosure at predetermined levels. The cart also has lighting and an ionization unit to control electrostatic discharge. The cart assembly is powered by an external power supply through a retractable power cord or through its on-board power supply. Also, the cart assembly can be specially configured to transport flat panel display cassettes by mounting a tilted platform within; this ensures that the flat panel display cassette remains securely seated within the tilted platform during transport. And to ensure the structural integrity of the cart assembly, a singular bracket is used to attach individual framing members of the cart together.