Paul M Zavracky

US Patent:

6353492, Mar 5, 2002

Filed:

Jan 3, 2001

Appl. No.:

09/753512

Inventors:

Robert William McClelland - Norwell MA
Noa More Rensing - West Newton MA
Mark Bradley Spitzer - Sharon MA
Paul Daniel Aquilino - Canton MA
Paul Martin Zavracky - Norwood MA

Assignee:

The Microoptical Corporation - Westwood MA
Northeastern University - Boston MA

International Classification:

G02F 103

US Classification:

359254, 359223, 359296, 359298

Abstract:

A torsional micro-mechanical mirror system includes a mirror assembly rotatably supported by a torsional mirror support assembly for rotational movement over and within a cavity in a base. The cavity is sized sufficiently to allow unimpeded rotation of the mirror assembly. The mirror assembly includes a support structure for supporting a reflective layer. The support structure is coplanar with and formed from the same wafer as the base. The torsional mirror support assembly includes at least one torsion spring formed of an electroplated metal. An actuator assembly is operative to apply a driving force to torsionally drive the torsional mirror support assembly, whereby torsional motion of the torsional mirror support assembly causes rotational motion of the mirror assembly. In another embodiment, a magnetic actuator assembly is provided to drive the mirror assembly. Other actuator assemblies are operative to push on the mirror assembly or provide electrodes spaced across the gap between the mirror assembly and the base.

US Patent:

6381022, Apr 30, 2002

Filed:

Jul 27, 2000

Appl. No.:

09/626678

Inventors:

Paul M. Zavracky - Norwood MA

Assignee:

Northeastern University - Boston MA

International Classification:

G01B 902

US Classification:

356454, 356519

Abstract:

The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.

US Patent:

6414783, Jul 2, 2002

Filed:

Mar 20, 2001

Appl. No.:

09/812611

Inventors:

Paul M. Zavracky - Norwood MA
John C. C. Fan - Chestnut Hill MA
Robert McClelland - Norwell MA
Jeffrey Jacobsen - Hollister CA
Brenda Dingle - Norton MA

Assignee:

Kopin Corporation - Taunton MA

International Classification:

G02B 2600

US Classification:

359291, 257 57, 257 59, 257347

Abstract:

A display panel is formed using essentially single crystal thin-film material that is transferred to substrates for display fabrication. The transfer includes the step of transferring the semiconductor regions onto a stretchable substrate. The resulting circuit panel can be incorporated into a display panel with a light emitting or liquid crystal material to provide the desired display.

US Patent:

6538799, Mar 25, 2003

Filed:

Jan 3, 2001

Appl. No.:

09/753510

Inventors:

Robert William McClelland - Norwell MA
Noa More Rensing - West Newton MA
Mark Bradley Spitzer - Sharon MA
Paul Daniel Aquilino - Canton MA
Paul Martin Zavracky - Norwood MA

Assignee:

The Microoptical Corporation - Westwood MA
Northeastern University - Boston MA

International Classification:

G02B 2600

US Classification:

359291, 359290, 359214, 359224, 359230, 359198, 359280, 310 22, 310 36, 438 52

Abstract:

A torsional micro-mechanical mirror system includes a mirror assembly rotatably supported by a torsional mirror support assembly for rotational movement over and within a cavity in a base. The cavity is sized sufficiently to allow unimpeded rotation of the mirror assembly. The mirror assembly includes a support structure for supporting a reflective layer. The support structure is coplanar with and formed from the same wafer as the base. The torsional mirror support assembly includes at least one torsion spring formed of an electroplated metal. An actuator assembly is operative to apply a driving force to torsionally drive the torsional mirror support assembly, whereby torsional motion of the torsional mirror support assembly causes rotational motion of the mirror assembly. In another embodiment, a magnetic actuator assembly is provided to drive the mirror assembly. Other actuator assemblies are operative to push on the mirror assembly or provide electrodes spaced across the gap between the mirror assembly and the base.

US Patent:

6608654, Aug 19, 2003

Filed:

Mar 17, 1997

Appl. No.:

08/716409

Inventors:

Paul M. Zavracky - Norwood MA
Brenda Dingle - Mansfield MA
Matthew Zavracky - North Attleboro MA
Mark B. Spitzer - Sharon MA

Assignee:

Kopin Corporation - Taunton MA

International Classification:

G02F 1136

US Classification:

349 45, 349111

Abstract:

The present invention relates to methods of fabricating pixel electrodes ( ) for active matrix displays including the formation of arrays of transistor circuits in thin film silicon ( ) on an insulating substrate and transfer of this active matrix circuit onto an optically transmissive substrate ( ). An array of color filter elements can be formed prior to transfer of the active matrix circuit that are aligned between a light source for the display and the array of pixel electrodes to provide a color display.

US Patent:

6624046, Sep 23, 2003

Filed:

Nov 1, 1999

Appl. No.:

09/430968

Inventors:

Paul M. Zavracky - Norwood MA
Matthew Zavracky - Attleboro MA
Brenda Dingle - Mansfield MA

Assignee:

Kopin Corporation - Taunton MA

International Classification:

H01L 2146

US Classification:

438455, 257783, 257278, 257132

Abstract:

A multi-layered structure is fabricated in which a microprocessor is configured in different layers and interconnected vertically through insulating layers which separate each circuit layer of the structure. Each circuit layer can be fabricated in a separate wafer or thin film material and then transferred onto the layered structure and interconnected.

US Patent:

6701038, Mar 2, 2004

Filed:

Mar 5, 2002

Appl. No.:

10/091980

Inventors:

Noa M. Rensing - West Newton MA
George G. Adams - West Newton MA
Nicol E. McGruer - Dover MA
Robert W. McClelland - Buzzards Bay MA
Paul M. Zavracky - Norwood MA

Assignee:

The Microoptical Corporation - Westwood MA

International Classification:

G02B 612

US Classification:

385 18, 385 14, 385 17

Abstract:

A micro-electromechanical optical switch assembly is provided for an optical network. The switch assembly includes arrays of input and output optical fibers and optical components for selecting light paths that connect any selected pair of input and output fibers. The optical components include optical switching elements, such as torsionally supported micromechanical mirrors that are electrostatically actuated to rotate to direct the light beam along the desired light path. The mirrors are bulk micromachined into a semiconductor wafer, preserving their optical qualities, and formed into a chip mated to a cover. The package incorporates alignment elements to ensure correct position and orientation of the optical components in the package.

US Patent:

6836394, Dec 28, 2004

Filed:

Feb 10, 2003

Appl. No.:

10/220910

Inventors:

Nicol E. McGruer - Dover MA
Paul M. Zavracky - Norwood MA

Assignee:

Northeastern University - Boston MA

International Classification:

H02H 900

US Classification:

361 56, 361 58, 361111, 361233

Abstract:

Apparatus and methods for protecting devices such as micro-switches ( ) and micro-relays from adverse effects of electrostatic discharge (ESD). A protection device is provided that includes a two terminal switch ( ) that can be actuated by an ESD event to protect an EDS-sensitive micro-switch or micro-relay from potential malfunction and/or damage. The two terminal switch is configured to close in less time than the micro-switch or micro-relay it is protecting, thereby disipating the energy associated with the ESD event without causing damage to the micro-relays which are provided with increased immunity to the adverse effects of ESD events. The micro-switch includes respective drain/gate terminal pairs at respective ends of the device. The micro-relay includes at least two drain terminals ( ) and a gate terminal ( ) at respective ends of the device. The micro-switch and micro-relay are configured to be less sensitive to ESD events by using the gate terminal ( ) at one end of the device to latch that end of the device down, thereby increasing the gate or drain voltage required to generate a threshold electric field to pull the other end of the device down.