Ping Z He

US Patent:

6456376, Sep 24, 2002

Filed:

May 24, 2001

Appl. No.:

09/864840

Inventors:

Martin M. Liphardt - Lincoln NE
Blaine D. Johs - Lincoln NE
Craig M. Herzinger - Lincoln NE
Ping He - Lincoln NE

Assignee:

J.A. Woollam Co., Inc. - Lincoln NE

International Classification:

G01J 400

US Classification:

356369

Abstract:

Disclosed is the application of spatial filter(s) in rotating compensator ellipsometer systems prior to or after a sample system. The purpose is, for instance, to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.

US Patent:

6549282, Apr 15, 2003

Filed:

Oct 18, 1999

Appl. No.:

09/419794

Inventors:

Blaine D. Johs - Lincoln NE
Craig M. Herzinger - Lincoln NE
Ping He - Lincoln NE

Assignee:

J. A. Woollam Co. Inc. - Lincoln NE

International Classification:

G01B 1106

US Classification:

356369

Abstract:

Disclosed are ellipsometer and polarimeter systems which have multi-element input and output lenses that demonstrate essentially the same focal length at each wavelength in a spectroscopic range of wavelengths.

US Patent:

6590655, Jul 8, 2003

Filed:

Apr 23, 2001

Appl. No.:

09/840483

Inventors:

James D. Welch - Omaha NE
Blaine D. Johs - Lincoln NE
Martin M. Liphardt - Lincoln NE
Ping He - Lincoln NE

Assignee:

J.A. Woollam Co. Inc. - Lincoln NE

International Classification:

G01J 400

US Classification:

356369, 356 73, 356326, 356445

Abstract:

Disclosed are systems for, and methods of controlling radial energy density profiles in, and/or cross-section dimensioning of electromagnetic beams in polarimeters, ellipsometers, reflectometers and spectrophotometers.

US Patent:

6804004, Oct 12, 2004

Filed:

May 30, 2000

Appl. No.:

09/583229

Inventors:

Blaine D. Johs - Lincoln NE
Craig M. Herzinger - Lincoln NE
Ping He - Lincoln NE
Martin M. Liphardt - Lincoln NE

Assignee:

J. A. Woollam Co., Inc - Lincoln NE

International Classification:

G01B 1106

US Classification:

356369

Abstract:

Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing lens(es), optionally in combination with beam directing and/or window elements present in an ellipsometer system which are positioned with respect to input and/or output len(es) so as to be ellipsometrically indistinguishable therefrom, to arrive at material system characterizing ellipsometric PSI and DELTA results.

US Patent:

6859278, Feb 22, 2005

Filed:

Jan 15, 2002

Appl. No.:

10/050802

Inventors:

Blaine D. Johs - Lincoln NE, US
Ping He - Lincoln NE, US
Martin M. Liphardt - Lincoln NE, US
Christopher A. Goeden - Lincoln NE, US
John A. Woollam - Lincoln NE, US
James D. Welch - Omaha ME, US

Assignee:

J.A. Woollam Co. Inc. - Lincoln NE

International Classification:

G01N021/21

US Classification:

356369

Abstract:

Disclosed is a system for enabling easy sequential setting of different Angles-of-Incidence of a beam of electromagnetic radiation to a surface of a sample system, and to regression based methodology for evaluating and compensating the effects of the presence of electromagnetic beam intercepting angle-of-incidence changing systems, including where desired, parameterization of calibration parameters.

US Patent:

6930813, Aug 16, 2005

Filed:

Apr 29, 2003

Appl. No.:

10/425801

Inventors:

Martin M. Liphardt - Lincoln NE, US
Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Ping He - Lincoln NE, US
James D. Welch - Omaha NE, US

Assignee:

J.A. Woollam Co. Inc. - Lincoln NE

International Classification:

G02F001/00
G02F001/33
G01J004/00
G01J003/28
G01J003/50

US Classification:

359237, 359308, 359641, 356369, 356327, 356 73, 356445, 250226, 25022715, 250372, 73657, 600476

Abstract:

Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.

US Patent:

6950182, Sep 27, 2005

Filed:

Jun 24, 2002

Appl. No.:

10/178723

Inventors:

Martin M Liphardt - Lincoln NE, US
Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Ping He - Lincoln NE, US

Assignee:

J. A. Woollam Co. - Lincoln NE

International Classification:

G01N021/00
G01J004/00

US Classification:

3562371, 356369

Abstract:

Disclosed is the application of a functional equivalent to a spatial filter in ellipsometer and the like systems. Included are demonstrated multi-element converging lens systems which focus an electromagnetic beam onto a fiber optic. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity is caused to quickly decay to zero, rather than, for instance, demonstrate an irregular profile as a function of radius.

US Patent:

6982792, Jan 3, 2006

Filed:

Feb 28, 2003

Appl. No.:

10/376677

Inventors:

John A. Woollam - Lincoln NE, US
Steven E. Green - Lincoln NE, US
Ping He - Lincoln NE, US
Blaine D. Johs - Lincoln NE, US
Craig M. Herzinger - Lincoln NE, US
Galen L. Pfeiffer - Lincoln NE, US
Brian D. Guenther - Lincoln NE, US
Martin M. Liphardt - Lincoln NE, US

Assignee:

J.A. Woollam Co. INC - Lincoln NE

International Classification:

G01J 4/00

US Classification:

356369

Abstract:

Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.

Address:

2628 Wilderness Rdg Cir, Lincoln, NE 68512

VIN:

1YVHP80C785M45769

Make:

MAZDA

Model:

MAZDA6

Year:

2008