Qin Xiao Chen

US Patent:

20210225682, Jul 22, 2021

Filed:

Jan 22, 2020

Appl. No.:

16/749336

Inventors:

- Santa Clara CA, US
Steven M. Anella - Newbury MA, US
Qin Chen - Gloucester MA, US
Ron Serisky - Gloucester MA, US
Julian G. Blake - Gloucester MA, US
David J. Chipman - Lynn MA, US

International Classification:

H01L 21/683
B23Q 3/154

Abstract:

A platen having improved thermal conductivity and reduced friction is disclosed. In one embodiment, vertically aligned carbon nanotubes are grown on the top surface of the platen. The carbon nanotubes have excellent thermal conductivity, thus improving the transfer of heat between the platen and the workpiece. Furthermore, the friction between the carbon nanotubes and the workpiece is much lower than that with conventional embossments, reducing particle generation. In another embodiment, a support plate is disposed on the platen, wherein the carbon nanotubes are disposed on the top surface of the support plate.

US Patent:

20200378837, Dec 3, 2020

Filed:

Sep 4, 2019

Appl. No.:

16/560566

Inventors:

- Santa Clara CA, US
D. Jeffrey Lischer - Gloucester MA, US
Qin Chen - Gloucester MA, US
Dale K. Stone - Lynnfield MA, US
Lyudmila Stone - Lynnfield MA, US
Steven Anella - West Newbury MA, US
Ron Serisky - Gloucester MA, US
Chi-Yang Cheng - Gloucester MA, US

Assignee:

APPLIED Materials, Inc. - Santa Clara CA

International Classification:

G01K 1/16
G01K 7/02
G01J 5/10
G01J 5/02

Abstract:

A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.