- Santa Clara CA, US D. Jeffrey Lischer - Gloucester MA, US Qin Chen - Gloucester MA, US Dale K. Stone - Lynnfield MA, US Lyudmila Stone - Lynnfield MA, US Steven Anella - West Newbury MA, US Ron Serisky - Gloucester MA, US Chi-Yang Cheng - Gloucester MA, US
Assignee:
APPLIED Materials, Inc. - Santa Clara CA
International Classification:
G01K 1/16 G01K 7/02 G01J 5/10 G01J 5/02
Abstract:
A temperature measurement apparatus. The temperature measurement apparatus may include a temperature sensor body, the temperature sensor body having a substrate support surface; and a heat transfer layer, disposed on the substrate support surface, the heat transfer layer comprising an array of aligned carbon nanotubes.