Rachelle J Bienstock

US Patent:

53272862, Jul 5, 1994

Filed:

Aug 31, 1992

Appl. No.:

7/937987

Inventors:

Jeffrey B. Sampsell - Plano TX
Rachelle J. Bienstock - Dallas TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

G02B 2746
G02B 964

US Classification:

359561

Abstract:

An optical correlation unit for correlating the images of an inspection object and a reference object. The unit uses two phase modulating reflective spatial light modulators. A first spatial light modulator receives electronic input in the form of image data representing the inspection object. It modulates incoming light with this input and reflects the modulated output to a first Fourier transform lens. This lens provides the optical input to a second spatial light modulator, whose electronic input is transform data representing the complex conjugate of the Fourier transform of the reference image. The electronic input modulates the optical input, resulting in the Fourier product of the two images, which is then transformed to provide correlation data.

US Patent:

51017644, Apr 7, 1992

Filed:

Feb 20, 1991

Appl. No.:

7/658121

Inventors:

Lee M. Loewenstein - Plano TX
Thomas E. Tang - Dallas TX
Ming Hwang - Richardson TX
Steve S. Huang - Dallas TX
Rachelle Bienstock - Dallas TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H01L 2100

US Classification:

118712

Abstract:

A method and apparatus for sensing radiation 26 indicative of at least one process variable in a semiconductor process chamber 10 in which a reactant gas reacts to effect changes in a silicon wafer 12. The method comprises positioning a substantially transparent window 22 in a conduit 14 leading to the wafer 12 and then flowing the reactant gas in the conduit 14 past the window 22 and toward the wafer 12. The radiation 26 is then sensed through the window 22. In the preferred embodiment the window 22 is positioned with an optical path along the center axis of the conduit 14. Other systems and methods are also disclosed.

US Patent:

48614211, Aug 29, 1989

Filed:

Jun 1, 1988

Appl. No.:

7/201007

Inventors:

Rachelle J. Bienstock - Richardson TX

Assignee:

Texas Instruments Incorporated - Dallas TX

International Classification:

H01L 21306
B44C 122

US Classification:

156635

Abstract:

Laser (12) assisted photochemical etching of Hg. sub. 1-x Cd. sub. x Te-type compounds (30) in solutions of bromine and other oxidants.