Ralph A Kelliher

US Patent:

20030047674, Mar 13, 2003

Filed:

Aug 13, 2002

Appl. No.:

10/217756

Inventors:

William Thornburn - Whitinsville MA, US
Norman Tobey - Bedford MA, US
Melvin Teare - Ashland MA, US
Douglas Klingbeil - Niwot CO, US
Ralph Kelliher - Newton MA, US

Assignee:

MicroE Systems, Inc. - Natick MA

International Classification:

G01D005/34

US Classification:

250/231130

Abstract:

The disclosed optical encoder includes a scale and a sensor head. The scale includes an optical grating and an optical element. The sensor head includes a light source, a detector array, and an index detector all of which are disposed on a substrate. The scale is disposed opposite the sensor head and is disposed for movement relative to the sensor head. The distance between the scale and the sensor head is selected so that the detector array lies near a talbot imaging plane. The light source emits a diverging beam of light, which is directed towards the scale. Light from the diverging beam of light is diffracted by the grating towards the detector array. Light from the diverging beam of light is diffracted by the optical element towards the index detector. The detector array provides a measurement of the position of the sensor head relative to the scale. The index detector provides a reference measurement of the position of the sensor head relative to the scale.