Raul Martinez Torres

US Patent:

54340900, Jul 18, 1995

Filed:

Dec 27, 1993

Appl. No.:

8/172988

Inventors:

Raul P. Torres - Austin TX

International Classification:

C23C 1600

US Classification:

437 10

Abstract:

A solid metal-gettering material is used between walls of a double-walled processing chamber, such as a furnace tube and an RTP chamber. The solid metal-gettering material getters metal before the metal reaches the substrate within the processing zone of a the processing chamber. Polysilicon pellets and silicon carbide pellets are examples of types of solid metal-getting materials, although other materials may be used. A purge gas may be flow within the gap or the gap may be evacuated while the pellets lie within the gap. Limitations on shapes and sizes of the pellets and purge gas flow rate are determined by the size of the gap.