Raymond D Rogers

US Patent:

20080116887, May 22, 2008

Filed:

Nov 20, 2006

Appl. No.:

11/601791

Inventors:

Raymond D. Rogers - Phoenix AZ, US

Assignee:

Heraeus, Inc. - Chandler AZ

International Classification:

G01R 33/02

US Classification:

324228

Abstract:

The present invention is directed towards an automated apparatus and method for determining the pass through flux (PTF) of a sputter target by generating a magnetic field on a first side of the sputter target and passing the magnetic field through the sputter target and out a second side of the sputter target, measuring the magnetic field at the second side of the sputter target with a magnetic field detector, and moving one or both the sputter target or the magnetic field detector during the measuring using an automated stand. In various embodiments of the present invention, the automated apparatus and method may generate a map of the sputter target.

US Patent:

20080150523, Jun 26, 2008

Filed:

Dec 20, 2006

Appl. No.:

11/641877

Inventors:

Raymond D. Rogers - Phoenix AZ, US

Assignee:

Heraeus Incorporated - Chandler AZ

International Classification:

G01R 15/00

US Classification:

324262

Abstract:

The present invention relates to an apparatus for a magnetic field detector holding assembly for manually-operated or automated pass-through flux (PTF) measurement stands for measuring sputter targets. The magnetic field detector holding assembly has an insert with a longitudinal opening, where the opening of the insert allows a magnetic field detector to be located. At least one fastener passes through at least one opening in the magnetic field detector holding apparatus, where the fastener is adapted to be adjusted to mechanically couple with the insert so as to hold the insert at a predetermined location within the magnetic field holding assembly. The insert prevents the magnetic field detector from being damaged by over-tightening of the fasteners, and also prevents scratching of the surface of a sputter target to be tested. The magnetic field detector holding assembly can be used by manually operated mechanical PTF stands or automated PTF stands.