Ricardo Jordan

US Patent:

62965468, Oct 2, 2001

Filed:

Jul 20, 1999

Appl. No.:

9/356787

Inventors:

Robert F. Allen - Gilbert AZ
Ricardo T. Jordan - Gilbert AZ

Assignee:

SpeedFam-IPEC Corporation - Chandler AR

International Classification:

B24B 722

US Classification:

451 5

Abstract:

A machine for polishing semiconductor wafers including a rotatable index table and a drive mechanism for the index table. The index table temporarily accommodates wafers between processing steps. The drive mechanism includes a continuously circulating grooved timing belt that engages gear teeth formed on an outside diameter portion of the index table to effect rotation of the index table. The index table includes a large diameter central opening for accommodating passage of other system components.

US Patent:

60335211, Mar 7, 2000

Filed:

Jun 4, 1997

Appl. No.:

8/869112

Inventors:

Robert F. Allen - Gilbert AZ
Ricardo T. Jordan - Gilbert AZ

Assignee:

SpeedFam-IPEC Corporation - Chandler AZ

International Classification:

C23F 102
B65G 118

US Classification:

156345

Abstract:

A tilt mechanism for periodically tilting a cassette configured to hold a plurality of wafers or workpieces such that the wafers or workpieces become gravity-loaded against a rear portion of the cassette. The tilt mechanism is mounted entirely above a worktable of a CMP or other processing machine and comprises a housing which houses a circular cam having a spiral groove formed therein. A tilt arm is pivotally mounted to the housing and extends vertically between a lower end which is adjacent the cam and an upper end which is fixed to a platform supporting a cassette holding a plurality of workpieces. A cam follower is attached to the lower end of the arm and projects into the groove. Rotary motion of the cam effects pivotal movement of the tilt arm which, in turn, effects tilting of the support platform and the cassette.

US Patent:

59759860, Nov 2, 1999

Filed:

Aug 8, 1997

Appl. No.:

8/908902

Inventors:

Robert F. Allen - Gilbert AZ
Ricardo T. Jordan - Gilbert AZ

Assignee:

SpeedFam-IPEC Corporation - Chandler AZ

International Classification:

B24B 722

US Classification:

451 5

Abstract:

A machine for polishing semiconductor wafers including a rotatable index table and a drive mechanism for the index table. The index table temporarily accommodates wafers between processing steps. The drive mechanism includes a continuously circulating grooved timing belt that engages gear teeth formed on an outside diameter portion of the index table to effect rotation of the index table. The index table includes a large diameter central opening for accommodating passage of other system components.

US Patent:

61901180, Feb 20, 2001

Filed:

Jan 7, 2000

Appl. No.:

9/479705

Inventors:

Robert F. Allen - Gilbert AZ
Ricardo T. Jordan - Gilbert AZ

Assignee:

SpeedFam-IPEC Corporation - Chandler AZ

International Classification:

B65G 4907

US Classification:

414811

Abstract:

A tilt mechanism for periodically tilting a cassette configured to hold a plurality of wafers or workpieces such that the wafers or workpieces become gravity-loaded against a rear portion of the cassette. The tilt mechanism is mounted entirely above a worktable of a CMP or other processing machine and comprises a housing which houses a circular cam having a spiral groove formed therein. A tilt arm is pivotally mounted to the housing and extends vertically between a lower end which is adjacent the cam and an upper end which is fixed to a platform supporting a cassette holding a plurality of workpieces. A cam follower is attached to the lower end of the arm and projects into the groove. Rotary motion of the cam effects pivotal movement of the tilt arm which, in turn, effects tilting of the support platform and the cassette.

US Patent:

62927086, Sep 18, 2001

Filed:

Jun 11, 1998

Appl. No.:

9/096066

Inventors:

Robert F. Allen - Gilbert AZ
Ricardo T. Jordan - Gilbert AZ

Assignee:

SpeedFam-IPEC Corporation - Chandler AZ

International Classification:

G06F 1900

US Classification:

700121

Abstract:

A distributed control system for a semiconductor wafer processing machine includes a master control module and a plurality of application control modules. Each of the application control modules and the master control module are capable of autonomous, independent operation. The master control module regulates the operation of the application control modules, and the application control modules govern a number of sub-procedures carried out by the wafer processing machine. The sub-procedures may be governed by respective processing recipes that are downloaded from the master control module to the application control modules via a network link architecture.