Richard Joseph Himics - Skillman NJ Nitin Vithalbhai Desai - Edison NJ Eugene Samuel Poliniak - Willingboro NJ
Assignee:
RCA Corporation - New York NY
International Classification:
C23C 1500
US Classification:
204192E
Abstract:
This invention pertains to a method of transferring a surface relief pattern from a poly(olefin sulfone) layer to a metal layer wherein the poly(olefin sulfone) layer is exposed to ultra violet radiation prior to sputter etching the surface relief pattern into the metal layer.
Richard Joseph Himics - Skillman NJ Scott Oliver Graham - Princeton NJ Daniel Louis Ross - Princeton NJ
Assignee:
RCA Corporation - New York NY
International Classification:
G03C 500 G03C 168
US Classification:
96 362
Abstract:
Copolymers of certain keto-olefins and SO. sub. 2 are sensitive to light and form films useful as photoresists in the manufacture of printed circuits, integrated circuits, printing plates and the like.
Olefin-So.sub.2 Copolymer Film Adhesion To A Substrate
Eugene Samuel Poliniak - Willingboro NJ Richard Joseph Himics - Skillman NJ Henry Wielicki - Wyndmoor PA
Assignee:
RCA Corporation - New York NY
International Classification:
H04N 582
US Classification:
427 43
Abstract:
To improve the adherence of an olefin-SO. sub. 2 copolymer film employed as an electron beam resist to a metallic substrate, a thin film of gold is first applied to the substrate. The resulting bond is strong enough to withstand exposure to electron beams, development of the resist film and electroplating of the film witout undercutting, lifting or distortion of the film.
Richard Joseph Himics - Skillman NJ Scott Oliver Graham - Princeton NJ Daniel Louis Ross - Princeton NJ
Assignee:
RCA Corporation - New York NY
International Classification:
G03C 168 G03C 500
US Classification:
96 67
Abstract:
Copolymers of certain keto-olefins and SO. sub. 2 are sensitive to light and form films useful as photoresists in the manufacture of printed circuits, integrated circuits, printing plates and the like.
Photoresist Containing A Thiodipropionate Compound
Eugene Samuel Poliniak - Willingboro NJ Howard George Scheible - Livingston NJ Richard Joseph Himics - Skillman NJ
Assignee:
RCA Corporation - New York NY
International Classification:
B05D 306 G11B 900
US Classification:
427 43
Abstract:
In preparing an electron beam resist film of a copolymer of an olefin and SO. sub. 2, the steps of removing insoluble particles, drying the films under high vacuum and storing them in a moisture-free atmosphere are required to prevent cracking of the films during development.
Development Of Poly(1-Methyl-1-Cyclopentene-So.sub.2) Electron Beam Resist
Eugene Samuel Poliniak - Willingboro NJ Richard Joseph Himics - Skillman NJ
Assignee:
RCA Corporation - New York NY
International Classification:
B05D 306 G11B 900
US Classification:
427 43
Abstract:
Three developer solvents 2-methylcyclohexanone, 3-methylcyclohexanone, and a mixture of acetonyl acetate and acetone, improve the resolution of electron beam exposed films of poly(1-methyl-1-cyclopentene-SO. sub. 2) copolymers.
Method For Purifying Methyl Alkyl Siloxane Lubricants
Nitin V. Desai - Somerset NJ Richard J. Himics - Trumbull CT
Assignee:
RCA Corporation - New York NY
International Classification:
C07F 720
US Classification:
2604482E
Abstract:
A method of purifying methyl alkyl siloxane lubricants of the formula ##STR1## wherein R is an alkyl group of 4-20 carbon atoms and x is an integer which comprises multiply extracting with acetone.