Richard L Muller

US Patent:

6758983, Jul 6, 2004

Filed:

Feb 13, 2002

Appl. No.:

10/076296

Inventors:

Robert A. Conant - Berkeley CA
Jocelyn T. Nee - Albany CA
Richard S. Muller - Kensington CA

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

H01L 2100

US Classification:

216 2, 216 24, 216 33, 216 36, 216 67

Abstract:

A staggered torsional electrostatic combdrive includes a stationary combteeth assembly and a moving combteeth assembly with a mirror and a torsional hinge. The moving combteeth assembly is positioned entirely above the stationary combteeth assembly by a predetermined vertical displacement during a combdrive resting state. A method of fabricating the staggered torsional electrostatic combdrive includes the step of deep trench etching a stationary combteeth assembly in a first wafer. A second wafer is bonded to the first wafer to form a sandwich including the first wafer, an oxide layer, and the second wafer. A moving combteeth assembly is formed in the second wafer. The moving combteeth assembly includes a mirror and a torsional hinge. The moving combteeth assembly is separated from the first wafer by the oxide layer. The oxide layer is subsequently removed to release the staggered torsional electrostatic combdrive.

US Patent:

6897539, May 24, 2005

Filed:

Apr 12, 2002

Appl. No.:

10/122451

Inventors:

Behrang Behin - Berkeley CA, US
Kam Yin Lau - Danville CA, US
Richard S. Muller - Kensington CA, US

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

H01L031/00

US Classification:

257444, 257434, 257435, 257436, 257443, 257462

Abstract:

Methods for directing an optical beam and for making an apparatus for directing an optical beam are described. One such method may include applying a first force to a plate to move the plate from a first angular orientation to a second angular orientation wherein the plate contacts a stop in the second angular orientation. A second force can be applied between the plate and the stop to hold the plate against the stop in a plane substantially parallel to a substantially planar surface of the stop. An apparatus for directing an optical beam may be made by coupling an array of plates to a base assembly wherein each plate is movable between a first angular orientation and a second angular orientation. An array of apertures may be formed in a stop assembly wherein the stop assembly is coupled to the base assembly and each aperture is positioned to contact its respective plate when the plate is in a second angular orientation.

US Patent:

6962830, Nov 8, 2005

Filed:

Feb 23, 2000

Appl. No.:

09/511428

Inventors:

Behrang Behin - Berkeley CA, US
Kam Yin Lau - Danville CA, US
Richard S. Muller - Kensington CA, US

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

H01L021/00

US Classification:

438 50, 438 52, 257443, 257444, 257462

Abstract:

Microstructure apparatus and methods are described. An exemplary movable microstructure apparatus includes a base, a plate, and a stop. The plate may be coupled to the base through a flexure, so that the plate is movable between a first angular orientation and a second angular orientation. The stop may be configured to contact the bottom portion of the plate in a contact area when the plate is in the second angular orientation. Alternatively, the stop may be configured to contact the plate in a contact area sized so that upon application of an electrostatic bias between the plate and the stop, a sufficient force holds the plate against the stop. Alternatively, the stop may have a substantially planar surface configured to contact the plate in a contact area sized so that, upon application of a force to the plate substantially normal to the substantially planar surface of the stop, a sufficient force holds the plate against the stop such that the plate lies in a plane substantially parallel to the substantially planar surface of the stop.

US Patent:

7079299, Jul 18, 2006

Filed:

May 31, 2000

Appl. No.:

09/584835

Inventors:

Robert A. Conant - Berkeley CA, US
Jocelyn T. Nee - Albany CA, US
Richard S. Muller - Kensington CA, US

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

G02B 26/08

US Classification:

359224, 310309

Abstract:

A staggered torsional electrostatic combdrive includes a stationary combteeth assembly and a moving combteeth assembly with a mirror and a torsional hinge. The moving combteeth assembly is positioned entirely above the stationary combteeth assembly by a predetermined vertical displacement during a combdrive state. A method of fabricating the staggered torsional electrostatic combdrive includes the step of deep trench etching a stationary combteeth assembly in a first wafer. A second wafer is bonded to the first wafer to form a sandwich including the first wafer, an oxide layer, and the second wafer. A moving combteeth assembly is formed in the second wafer. The moving combteeth assembly includes a mirror and a torsional hinge. The moving combteeth assembly is separated from the first wafer by the oxide layer. The oxide layer is subsequently removed to release the staggered torsional electrostatic combdrive.

US Patent:

7301177, Nov 27, 2007

Filed:

May 14, 2004

Appl. No.:

10/846137

Inventors:

Behrang Behin - Berkeley CA, US
Kam Yin Lau - Danville CA, US
Richard S. Muller - Kensington CA, US

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

H01L 29/74

US Classification:

257108, 257415, 257428, 257432, 257433, 257443

Abstract:

Methods for directing an optical beam and for making an apparatus for directing an optical beam are described. One such method may include applying a first force to a plate to move the plate from a first angular orientation to a second angular orientation wherein the plate contacts a stop in the second angular orientation. A reflective portion of the plate is stopped from rotating beyond the second angular orientation. A second force can be applied between the plate and the stop to hold the plate against the stop in a plane substantially parallel to a substantially planar surface of the stop. An apparatus for directing an optical beam may be made by coupling an array of plates to a base assembly wherein each plate is movable between a first angular orientation and a second angular orientation.

US Patent:

7355793, Apr 8, 2008

Filed:

May 18, 2005

Appl. No.:

11/133455

Inventors:

Hyuck Choo - Emeryville CA, US
Richard S. Muller - Kensington CA, US

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

G02B 27/10
G02B 26/00
G02F 1/00

US Classification:

359619, 359237

Abstract:

An addressable array of lenses is disclosed. Two electrical connections per row address specific lenses within that row. Carriages support individual lenses, thus forming resonant units with frequencies unique within each row. A voltage, having the same frequency as a selected resonant unit is applied. The selected lens produces a resonating image. Testing has verified proper resonance addressing within a 5-by-5 array of microlenses. The array can be applied to a Shack-Hartmann (SH) sensor. To compensate for errant images formed outside of their image area, resonating images are identified by a processor. The array thus improves the dynamic range of the wavefront aberration that can be measured by an SH sensor. The inventors currently estimate the improvement over conventional designs to be about a factor of 30.

US Patent:

7564559, Jul 21, 2009

Filed:

Jun 2, 2006

Appl. No.:

11/446552

Inventors:

Hyuck Choo - Albany CA, US
Richard S. Muller - Kensington CA, US
David Garmire - El Cerrito CA, US
James W. Demmel - Berkeley CA, US
Rishi Kant - Stanford CA, US

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

G01B 9/02
G01L 1/24

US Classification:

356450, 356 355

Abstract:

Provided herein are optical devices fabricated to include a reflective surface, actuators and stress-relieving structures. Systems containing such devices, and methods of manufacturing such devices, are also provided.

US Patent:

7573022, Aug 11, 2009

Filed:

Jul 25, 2006

Appl. No.:

11/492270

Inventors:

Hyuck Choo - Albany CA, US
David Garmire - El Cerrito CA, US
Richard S. Muller - Kensington CA, US
James Demmel - Berkeley CA, US

Assignee:

The Regents of the University of California - Oakland CA

International Classification:

H01J 3/14
H01L 29/78
G02B 26/08

US Classification:

250234, 257415, 3591981

Abstract:

The present invention relates to systems and methods for fabricating microscanners. The fabrication processes employed pursuant to some embodiments are compatible with well known CMOS fabrication techniques, allowing devices for control, monitoring and/or sensing to be integrated onto a single chip. Both one- and two-dimensional microscanners are described. Applications including optical laser surgery, maskless photolithography, portable displays and large scale displays are described.