Richard Allen Rudy

US Patent:

20060232163, Oct 19, 2006

Filed:

Apr 18, 2005

Appl. No.:

11/109108

Inventors:

Richard Rudy - Menlo Park CA, US
Graham Flower - San Jose CA, US
John Larson - Palo Alto CA, US
Mark Unkrich - Emerald Hills CA, US

International Classification:

H01L 41/113

US Classification:

310319000

Abstract:

An apparatus and method for detecting a target environmental variable (TEV). A first film-bulk acoustic resonator (FBAR) oscillator that includes a first FBAR with a first response to the target environmental variable generates a first frequency. A second film-bulk acoustic resonator (FBAR) oscillator that includes a second FBAR with a second response to the target environmental variable generates a second frequency. A circuit that is coupled to the first FBAR oscillator and the second FBAR oscillator determines the target environmental variable (e.g., changes in the TEV) based on the first frequency and the second frequency.

US Patent:

20070063622, Mar 22, 2007

Filed:

Sep 9, 2005

Appl. No.:

11/223386

Inventors:

Richard Rudy - Menlo Park CA, US

International Classification:

H01L 29/76
H01L 41/00

US Classification:

310341000, 257328000, 310363000

Abstract:

A temperature compensated pair of resonators. The temperature compensated pair of resonators comprises a first resonator configured to resonate at a first frequency and having a first frequency temperature coefficient and a second resonator configured to resonate at a second frequency and having a second frequency temperature coefficient. The second frequency is greater than the first frequency; the second frequency temperature coefficient is less than the first frequency temperature coefficient; and the first and the second resonators are fabricated on a common substrate.