Robert Laszlo Badzey from 41 Pine St, Bedford, MA 01730, age 49

Nanomechanical Oscillator
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US Patent:

8063535, Nov 22, 2011
Filed:

Jan 4, 2006
Appl. No.:

11/813342
Inventors:

Pritiraj Mohanty - Boston MA, US
Alexei Gaidarzhy - Allston MA, US
Guiti Zolfagharkhani - Allston MA, US
Robert L. Badzey - Quincy MA, US
Assignee:

Trustees of Boston University - Boston MA
International Classification:

H01L 41/08
US Classification:

310321, 310330, 310331, 333187, 333195
Abstract:

A mechanical oscillator has components with dimensions in a sub-micron range to produce resonance mode oscillations in a gigahertz range. A major element is coupled to a minor, sub-micron element to produce large amplitude gigahertz frequency oscillation that is detected with readily available techniques. The mechanical structure can be formed according to a number of geometries including beams and rings and is excited with electrostatic, magnetic and thermal related forces, as well as other excitation techniques. The mechanical structure can be arranged in arrays for applications such as amplification and mixing and is less sensitive to shock and radiative environments than electrical or optical counterparts.

Nano Electromechanical Integrated-Circuit Filter
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US Patent:

8314665, Nov 20, 2012
Filed:

Sep 20, 2007
Appl. No.:

12/311141
Inventors:

Pritiraj Mohanty - Los Angeles CA, US
Robert L. Badzey - Quincy MA, US
Alexei Gaidarzhy - Allston MA, US
Assignee:

Trustees of Boston University - Boston MA
International Classification:

H03H 9/24
H03H 9/46
US Classification:

333186, 333197, 333200, 257415, 977701, 977932
Abstract:

A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.

Nano Electromechanical Integrated-Circuit Bank And Switch
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US Patent:

8487715, Jul 16, 2013
Filed:

Sep 20, 2007
Appl. No.:

12/311143
Inventors:

Pritiraj Mohanty - Los Angeles CA, US
Robert L. Badzey - Quincy MA, US
Assignee:

Trustees of Boston University - Boston MA
International Classification:

H03H 9/70
H03H 9/74
H03H 9/46
H03H 9/24
US Classification:

333133, 333186, 333101
Abstract:

A bank of nano electromechanical integrated circuit filters. The bank of integrated circuit filters comprising a silicon substrate; a sacrificial layer; a device layer including at least two resonators, wherein the at least two resonators include sub-micro excitable elements and wherein the at least two resonators posses a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least two resonators is determined by the fundamental frequency of the sub-micron elements. At least one switch connects to the bank of integrated circuit filters.

Controllable Nanomechanical Memory Element
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US Patent:

20070274123, Nov 29, 2007
Filed:

May 24, 2005
Appl. No.:

11/597150
Inventors:

Robert Badzey - Brookline MA, US
Alexei Gaidarzhy - Allston MA, US
Guiti Zolfagharkhani - Allston MA, US
Assignee:

TRUSTEES OF BOSTON UNIVERSITY - Boston MA
International Classification:

G11C 23/00
US Classification:

365151000
Abstract:

A memory device includes a mechanical element that exhibits distinct bistable states under amplitude modulation. The states are dynamically bistable or multi-stable with the application of a drive signal of a given frequency. The natural resonance of the element in conjunction with a hysteretic effect produces distinct states over a specific frequency range. Devices with multiple elements that respond to different frequency ranges provided on a common contact are formed with improved density. The devices may be excited and read with magnetomotive, capacitive, piezoelectric and/or optical methods. The devices may be planar oriented or out of plane oriented to permit three dimensional memory structures. DC biases may be used to shift frequency responses to permit an alternate method for differentiating states of the element.

Energy Contamination Monitor With Neutral Current Detection
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US Patent:

20100019141, Jan 28, 2010
Filed:

Jul 22, 2009
Appl. No.:

12/507345
Inventors:

Joseph C. Olson - Beverly MA, US
Robert L. Badzey - Quincy MA, US
Assignee:

VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. - Gloucester MA
International Classification:

B01D 59/44
H01J 27/00
H01J 49/00
G01K 1/08
A61N 5/00
US Classification:

250282, 250423 R, 250426, 250287, 250397, 2504923
Abstract:

This energy contamination monitor has an ionization apparatus configured to ionize the neutral particles in an ion beam. Neutral particles are ionized, separated based at least in part upon different transit times over a distance, and measured with the Faraday electrode based at least in part upon the different transit times. The energy contamination monitor can distinguish between fast and slow neutral particles.

Electro-Mechanical Oscillating Devices And Associated Methods
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US Patent:

20110068834, Mar 24, 2011
Filed:

Feb 8, 2008
Appl. No.:

12/028327
Inventors:

Pritiraj Mohanty - Los Angeles CA, US
Matthias Imboden - Rye NH, US
Seung-Bo Shim - Gyeonggi-do, KR
Alexei Gaidarzhy - Boston MA, US
Guiti Zolfagharkhani - Boston MA, US
Robert L. Badzey - Quincy MA, US
Assignee:

Trustees of Boston University - Boston MA
International Classification:

H03D 7/00
US Classification:

327113
Abstract:

Electro-mechanical oscillating devices designed to convert the frequency of electrical signal(s) and methods associated with the same are described. One example of such a frequency converting device is a mixer.

Nano Electromechanical Integrated-Circuit Filter
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US Patent:

20130162373, Jun 27, 2013
Filed:

Oct 31, 2012
Appl. No.:

13/664721
Inventors:

Robert L. Badzey - Quincy MA, US
Alexei Gaidarzhy - Brighton MA, US
Assignee:

Trustees of Boston University - Boston MA
International Classification:

H03H 9/46
US Classification:

333186
Abstract:

A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator possess a fundamental mode frequency as well as a collective mode frequency and wherein the collective mode frequency of the at least one resonator is determined by the fundamental frequency of the sub-micron elements.