Robert H Behrens

US Patent:

46706852, Jun 2, 1987

Filed:

Apr 14, 1986

Appl. No.:

6/851755

Inventors:

William M. Clark - Thousand Oaks CA
Mark W. Utlaut - Saugus CA
Joseph A. Wysocki - Oxnard CA
Edmund K. Storms - Los Alamos NM
Eugene G. Szklarz - Los Alamos NM
Robert G. Behrens - Los Alamos NM
Lynwood W. Swanson - McMinnville OR
Anthony E. Bell - McMinnville OR

Assignee:

Hughes Aircraft Company - Los Angeles CA

International Classification:

H01J 105
H01J 2726

US Classification:

313230

Abstract:

A liquid metal ion source and alloy for the simultaneous ion evaporation of arsenic and boron, arsenic and phosphorus, or arsenic, boron and phosphorus. The ionic species to be evaporated are contained in palladium-arsenic-boron and palladium-arsenic-boron-phosphorus alloys. The ion source, including an emitter means such as a needle emitter and a source means such as U-shaped heater element, is preferably constructed of rhenium and tungsten, both of which are readily fabricated. The ion sources emit continuous beams of ions having sufficiently high currents of the desired species to be useful in ion implantation of semiconductor wafers for preparing integrated circuit devices. The sources are stable in operation, experience little corrosion during operation, and have long operating lifetimes.

US Patent:

47758180, Oct 4, 1988

Filed:

Apr 14, 1986

Appl. No.:

6/851757

Inventors:

William M. Clark - Thousand Oaks CA
Mark W. Utlaut - Saugus CA
Robert G. Behrens - Los Alamos NM
Eugene G. Szklarz - Los Alamos NM
Edmund K. Storms - Los Alamos NM
Robert P. Santandrea - Santa Fe NM
Lynwood W. Swanson - McMinnville OR

Assignee:

Hughes Aircraft Company - Los Angeles CA
Oregon Graduate Center - Beaverton OR
The United States of America as represented by the United States
Department of Energy - Washington DC

International Classification:

H01J 2702

US Classification:

313230

Abstract:

A liquid metal ion source and alloy, wherein the species to be emitted from the ion source is contained in a congruently vaporizing alloy. In one embodiment, the liquid metal ion source acts as a source of arsenic, and in a source alloy the arsenic is combined with palladium, preferably in a liquid alloy having a range of compositions from about 24 to about 33 atomic percent arsenic. Such an alloy may be readily prepared by a combustion synthesis technique. Liquid metal ion sources thus prepared produce arsenic ions for implantation, have long lifetimes, and are highly stable in operation.