Robert Edward Dillon

US Patent:

6958807, Oct 25, 2005

Filed:

Nov 24, 2003

Appl. No.:

10/719067

Inventors:

Wouter Onno Pril - Eindhoven, NL
Engelbertus Antonius F. Van De Pasch - Oirschot, NL
Robert F. Dillon - Stoneham MA, US
Philip Dennis Henshaw - Carlisle MA, US

Assignee:

ASML Netherlands B.V. - Veldhoven

International Classification:

G03B027/72
G03B027/54

US Classification:

355 71, 355 67

Abstract:

Measurements of an interferometric measurement system are corrected for variations of atmospheric conditions such as pressure, temperature, and turbulence using measurements from a second harmonic interferometer (SHI). A ramp, representing the dependence of the SHI data on path length, is removed before utilizing the SHI data. The SHI may include a passive Q-switched laser as a light source and Brewster prisms in the receiver module. Optical fibers may be used to conduct light to the detectors. A mirror reflecting the measurement beams has a coating of a thickness selected to minimize the sensitivity of the SHI data to changes in coating thickness.

US Patent:

6987557, Jan 17, 2006

Filed:

Nov 24, 2003

Appl. No.:

10/719067

Inventors:

Wouter Onno Pril - Eindhoven, NL
Engelbertus Antonius F. Van De Pasch - Oirschot, NL
Robert F. Dillon - Stoneham MA, US
Philip Dennis Henshaw - Carlisle MA, US

Assignee:

ASML Netherlands B.V. - Veldhoven

International Classification:

G03B 27/72
G03B 27/54

US Classification:

355 71, 355 67

Abstract:

Measurements of an interferometric measurement system are corrected for variations of atmospheric conditions such as pressure, temperature, and turbulence using measurements from a second harmonic interferometer (SHI). A ramp, representing the dependence of the SHI data on path length, is removed before utilizing the SHI data. The SHI may include a passive Q-switched laser as a light source and Brewster prisms in the receiver module. Optical fibers may be used to conduct light to the detectors. A mirror reflecting the measurement beams has a coating of a thickness selected to minimize the sensitivity of the SHI data to changes in coating thickness.

US Patent:

7088495, Aug 8, 2006

Filed:

May 30, 2003

Appl. No.:

10/449236

Inventors:

Pierre C. Trepagnier - Medford MA, US
Philip D. Henshaw - Carlisle MA, US
Robert F. Dillon - Stoneham MA, US

Assignee:

Sparta, Inc. - Lake Forest CA
Lumen Laboratories, Inc. - Burlington MA

International Classification:

G02F 1/35
H04J 14/08

US Classification:

359326, 398 52, 398 98

Abstract:

The present invention generally provides systems and methods for distribution of radiation among a plurality of optical channels, each of which can include a non-linear optical element. An optical system of the invention can include a source for generating radiation and an optical time-division multiplexer that can deflect, at any given time interval, the radiation into one of a plurality of optical channels.

US Patent:

7595892, Sep 29, 2009

Filed:

Apr 4, 2006

Appl. No.:

11/910642

Inventors:

Neil Judell - Newtonville MA, US
Robert F. Dillon - Chelmsford MA, US

Assignee:

Dimensional Photonics International, Inc. - Wilmington MA

International Classification:

G01B 11/02
G01B 9/02

US Classification:

356511, 356521

Abstract:

Described are a multiple channel interferometric surface contour measurement system and methods of determining surface contour data for the same. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. Fringe patterns generated by spatially separate channels in the projector are projected onto an object surface to be measured. The digital camera acquires images of the fringe patterns and the processor determines surface contour data from the fringe patterns. More specifically, fringe numbers are determined for points on the object surface based on image data. The fringe numbers are modified according to collinear adjustment values so that the modified fringe numbers correspond to a common, collinear axis for the interferometer projector. After unwrapping the modified fringe numbers, the unwrapped values are modified by the collinear adjustment values to obtain accurate fringe numbers for the pixels in each interferometer channel.

US Patent:

7599071, Oct 6, 2009

Filed:

Apr 4, 2006

Appl. No.:

11/910646

Inventors:

Robert F. Dillon - Chelmsford MA, US
Roy D. Allen - North Andover MA, US
Neil Judell - Newtonville MA, US
Yi Qian - Acton MA, US

Assignee:

Dimensional Photonics International, Inc. - Wilmington MA

International Classification:

G01B 9/02
G01B 11/02

US Classification:

356521, 356499

Abstract:

Described is an interferometric surface contour measurement system for projecting structured light patterns onto an object. The measurement system includes an interferometric projector, an imager, and a processor. The imager is rigidly coupled to the projector to maintain a stable relationship to the projected, structured light pattern. The imager receives the structured light pattern and together with the processor, determines whether the projected image includes a positional error. In some embodiments, the projector is a multi-channel projector, each channel having an optical axis spatially separated from the others, one of the channels including the imager and dedicated for determining positional error. In other embodiments, the projector is a single-channel projector projecting a structured light pattern onto the object, a portion of the structured light pattern being tapped-off for determining positional error.

US Patent:

7751063, Jul 6, 2010

Filed:

Apr 4, 2006

Appl. No.:

11/910638

Inventors:

Robert F. Dillon - Chelmsford MA, US
Neil Judell - Newtonville MA, US
Yi Qian - Acton MA, US
Yunqing Zhu - Andover MA, US
D. Scott Ackerson - Windham NH, US
Gurpreet Singh - Providence RI, US

Assignee:

Dimensional Photonics International, Inc. - Wilmington MA

International Classification:

G01B 9/02
G01B 11/02

US Classification:

356511, 356521, 356497

Abstract:

Described is a multiple channel interferometric surface contour measurement system. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. The projector includes two or more interferometer channels. Each channel has an optical axis spatially separate from the optical axes of the other channels. Each channel projects a fringe pattern onto the surface of an object to be measured. Image data for the fringe patterns projected on the object surface are acquired by the digital camera. The processor controls the projection of the fringe patterns of different spatial frequencies, adjusts the phase of each fringe pattern and generates surface contour data in response to the camera image data. The multiple channel interferometric surface contour measurement system provides numerous advantages over conventional single channel interferometric systems, including reduced sensitivity to optical noise, improved stability and increased measurement accuracy.

US Patent:

7821634, Oct 26, 2010

Filed:

Apr 18, 2008

Appl. No.:

12/106233

Inventors:

Robert Dillon - Chelmsford MA, US
Lee Grodzins - Lexington MA, US
Stephanie Melikian - Somerville MA, US

Assignee:

Thermo Niton Analyzers LLC - Billerica MA

International Classification:

G01J 3/30

US Classification:

356318

Abstract:

Multiple energy sources, such as a laser and electrical current, are employed, in close coordination, spatially and temporally, to clean a sample, vaporize its material and excite vapor atoms for the purpose of atomic emission spectroscopy. These methods permit better monitoring and control of the individual processes in real time, lead to higher consistency and higher quality optical emission spectra, and enhance the measurements of non-conducting solids, liquids and gases. Additionally, a portable instrument is provided with both laser source and spectrometer optically coupled to a hand-holdable unit.

US Patent:

20090324212, Dec 31, 2009

Filed:

Sep 3, 2009

Appl. No.:

12/553526

Inventors:

Robert F. Dillon - Chelmsford MA, US
Neil Judell - Newtonville MA, US
Yi Qian - Acton MA, US
Yuqing Zhu - Andover MA, US
D. Scott Ackerson - Windham NH, US
Gurpreet Singh - Providence RI, US

Assignee:

DIMENSIONAL PHOTONICS INTERNATIONAL, INC. - Wilmington MA

International Classification:

G03B 17/00

US Classification:

396428

Abstract:

Described is a multiple channel interferometric surface contour measurement system. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. The projector includes two or more interferometer channels. Each channel has an optical axis spatially separate from the optical axes of the other channels. Each channel projects a fringe pattern onto the surface of an object to be measured. Image data for the fringe patterns projected on the object surface are acquired by the digital camera. The processor controls the projection of the fringe patterns of different spatial frequencies, adjusts the phase of each fringe pattern and generates surface contour data in response to the camera image data. The multiple channel interferometric surface contour measurement system provides numerous advantages over conventional single channel interferometric systems, including reduced sensitivity to optical noise, improved stability and increased measurement accuracy.