Robert F Dillon

US Patent:

7599071, Oct 6, 2009

Filed:

Apr 4, 2006

Appl. No.:

11/910646

Inventors:

Robert F. Dillon - Chelmsford MA, US
Roy D. Allen - North Andover MA, US
Neil Judell - Newtonville MA, US
Yi Qian - Acton MA, US

Assignee:

Dimensional Photonics International, Inc. - Wilmington MA

International Classification:

G01B 9/02
G01B 11/02

US Classification:

356521, 356499

Abstract:

Described is an interferometric surface contour measurement system for projecting structured light patterns onto an object. The measurement system includes an interferometric projector, an imager, and a processor. The imager is rigidly coupled to the projector to maintain a stable relationship to the projected, structured light pattern. The imager receives the structured light pattern and together with the processor, determines whether the projected image includes a positional error. In some embodiments, the projector is a multi-channel projector, each channel having an optical axis spatially separated from the others, one of the channels including the imager and dedicated for determining positional error. In other embodiments, the projector is a single-channel projector projecting a structured light pattern onto the object, a portion of the structured light pattern being tapped-off for determining positional error.

US Patent:

7751063, Jul 6, 2010

Filed:

Apr 4, 2006

Appl. No.:

11/910638

Inventors:

Robert F. Dillon - Chelmsford MA, US
Neil Judell - Newtonville MA, US
Yi Qian - Acton MA, US
Yunqing Zhu - Andover MA, US
D. Scott Ackerson - Windham NH, US
Gurpreet Singh - Providence RI, US

Assignee:

Dimensional Photonics International, Inc. - Wilmington MA

International Classification:

G01B 9/02
G01B 11/02

US Classification:

356511, 356521, 356497

Abstract:

Described is a multiple channel interferometric surface contour measurement system. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. The projector includes two or more interferometer channels. Each channel has an optical axis spatially separate from the optical axes of the other channels. Each channel projects a fringe pattern onto the surface of an object to be measured. Image data for the fringe patterns projected on the object surface are acquired by the digital camera. The processor controls the projection of the fringe patterns of different spatial frequencies, adjusts the phase of each fringe pattern and generates surface contour data in response to the camera image data. The multiple channel interferometric surface contour measurement system provides numerous advantages over conventional single channel interferometric systems, including reduced sensitivity to optical noise, improved stability and increased measurement accuracy.

US Patent:

7821634, Oct 26, 2010

Filed:

Apr 18, 2008

Appl. No.:

12/106233

Inventors:

Robert Dillon - Chelmsford MA, US
Lee Grodzins - Lexington MA, US
Stephanie Melikian - Somerville MA, US

Assignee:

Thermo Niton Analyzers LLC - Billerica MA

International Classification:

G01J 3/30

US Classification:

356318

Abstract:

Multiple energy sources, such as a laser and electrical current, are employed, in close coordination, spatially and temporally, to clean a sample, vaporize its material and excite vapor atoms for the purpose of atomic emission spectroscopy. These methods permit better monitoring and control of the individual processes in real time, lead to higher consistency and higher quality optical emission spectra, and enhance the measurements of non-conducting solids, liquids and gases. Additionally, a portable instrument is provided with both laser source and spectrometer optically coupled to a hand-holdable unit.

US Patent:

8390822, Mar 5, 2013

Filed:

Oct 23, 2008

Appl. No.:

12/738199

Inventors:

Robert F. Dillon - Bedford NH, US
Bing Zhao - Newton MA, US
Neil H. K. Judell - Newton MA, US

Assignee:

Dimensional Photonics International, Inc. - Wilmington MA

International Classification:

G01B 11/24
G01B 9/021
G01B 11/02

US Classification:

356601, 356457, 356511, 356512, 356514

Abstract:

Described are a method and device for determining three-dimensional position information of a surface of a translucent object having a wavelength-dependent transmittance and reflectance characteristics. The method includes illuminating the surface of the translucent object with optical radiation at a predetermined wavelength emitted from a pair of optical sources. Radiation scattered from the surface and below the surface is detected, and a phase of the optical radiation from one of the optical sources relative to a phase of the optical radiation from the other optical source is changed before again detecting the scattered radiation. The predetermined wavelength is selected so that the optical radiation scattered from below the surface and detected provides a substantially constant background intensity with respect to the optical radiation scattered from the surface and detected. Three-dimensional position information of the surface is calculated in response to the detected radiation.

US Patent:

8477318, Jul 2, 2013

Filed:

Oct 23, 2008

Appl. No.:

12/738207

Inventors:

Robert F. Dillon - Bedford NH, US
Yi Qian - Acton MA, US
Gurpreet Singh - Providence RI, US

Assignee:

Dimensional Photonics International, Inc. - Wilmington MA

International Classification:

G01B 11/02
G01B 9/21
G01B 11/24

US Classification:

356511, 356477, 356496, 356601

Abstract:

Described are an imaging device and method for determining three-dimensional position information of a surface of an object. The device includes a pair of optical fibers, a phase shifter, a detector array and a processor. The phase shifter is coupled to one of the optical fibers and is used to change a phase of optical radiation emitted from the optical fiber relative to a phase of optical radiation emitted from the other optical fiber. The detector array receives optical radiation scattered by the surface of the object. The processor communicates with the detector array and the phase shifter. Signals generated by the detector array are received by the processor and three-dimensional position information for the surface is calculated in response to the received optical radiation scattered by the surface of the object and the change in the relative phase of optical radiation emitted by the optical fibers.

US Patent:

20090324212, Dec 31, 2009

Filed:

Sep 3, 2009

Appl. No.:

12/553526

Inventors:

Robert F. Dillon - Chelmsford MA, US
Neil Judell - Newtonville MA, US
Yi Qian - Acton MA, US
Yuqing Zhu - Andover MA, US
D. Scott Ackerson - Windham NH, US
Gurpreet Singh - Providence RI, US

Assignee:

DIMENSIONAL PHOTONICS INTERNATIONAL, INC. - Wilmington MA

International Classification:

G03B 17/00

US Classification:

396428

Abstract:

Described is a multiple channel interferometric surface contour measurement system. The measurement system includes a multiple channel interferometer projector, a digital camera and a processor. The projector includes two or more interferometer channels. Each channel has an optical axis spatially separate from the optical axes of the other channels. Each channel projects a fringe pattern onto the surface of an object to be measured. Image data for the fringe patterns projected on the object surface are acquired by the digital camera. The processor controls the projection of the fringe patterns of different spatial frequencies, adjusts the phase of each fringe pattern and generates surface contour data in response to the camera image data. The multiple channel interferometric surface contour measurement system provides numerous advantages over conventional single channel interferometric systems, including reduced sensitivity to optical noise, improved stability and increased measurement accuracy.

US Patent:

20110298896, Dec 8, 2011

Filed:

Feb 19, 2010

Appl. No.:

13/201698

Inventors:

Robert F. Dillon - Bedford NH, US
Neil H. K. Judell - Newton MA, US
Timothy I. Fillion - Bedford MA, US
Ran Yi - Watertown MA, US

Assignee:

DIMENSIONAL PHOTONICS INTERNATIONAL, INC. - Wilmington MA

International Classification:

G02B 27/48
G02B 27/10
G02B 26/10
H04N 13/02
G02B 26/08

US Classification:

348 46, 359298, 3592121, 359618, 359619, 348E13074

Abstract:

Described are methods and apparatus for reducing speckle noise in images, such as images of objects illuminated by coherent light sources and images of objects illuminated by interferometric fringe patterns. According to one method, an object is illuminated with a structured illumination pattern of coherent radiation projected along a projection axis. An angular orientation of the projection axis is modulated over an angular range during an image acquisition interval. Advantageously, shape features of the structured illumination pattern projected onto the surface of the object remain unchanged during image acquisition and the acquired images exhibit reduced speckle noise. The structured illumination pattern can be a fringe pattern such as an interferometric fringe pattern generated by a 3D metrology system used to determine surface information for the illuminated object.

US Patent:

20110299094, Dec 8, 2011

Filed:

Feb 23, 2009

Appl. No.:

13/201687

Inventors:

Robert F. Dillon - Bedford NH, US
Neil H. K. Judell - Newton MA, US
Timothy I. Fillion - Bedford MA, US
Gurpreet Singh - Providence RI, US
Nathan E. Wallace - Tyngsborough MA, US

Assignee:

DIMENSIONAL PHOTONICS INTERNATIONAL, INC. - Wilmington MA

International Classification:

G01B 11/25
G02F 1/11
G02B 26/00

US Classification:

356603, 359238, 359285

Abstract:

Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.