Medical School University of Texas Medical School at Houston Graduated: 1977
Languages:
English Spanish Vietnamese
Description:
Dr. Kavanagh graduated from the University of Texas Medical School at Houston in 1977. He works in Bellaire, TX and 1 other location and specializes in Anesthesiology. Dr. Kavanagh is affiliated with Baylor St Lukes Medical Center, CHI St Lukes Health The Vintage Hospital, Memorial Hermann Orthopedic & Spine Hospital and Memorial Hermann Texas Medical Center.
Robert J. Kavanagh - Natick MA, US James W. Thackeray - Braintree MA, US
Assignee:
Shipley Company, L.L.C. - Marlborough MA
International Classification:
G03F 7/004
US Classification:
4302701, 430306, 430320, 430322, 430434, 430494
Abstract:
New photoresists are provided that are suitable for short wavelength imaging, including sub-200 nm, particularly 193 nm. Resists of the invention comprise a polymer that is preferably substantially free of aromatic moieties and comprises photoacid-labile repeat units, a photoactive components such as one or more photoacid generator compounds and a solvent component that comprises methyl isoamyl ketone (5-methyl-2-hexanone).