Robert D Kos

US Patent:

61645303, Dec 26, 2000

Filed:

Apr 8, 1994

Appl. No.:

8/225228

Inventors:

Nicholas T. Cheesebrow - St. Paul MN
Shawn D. Eggum - Victoria MN
Robert D. Kos - Victoria MN
Randy S. Williams - Chaska MN

Assignee:

Fluoroware, Inc. - Chaska MN

International Classification:

G06K 500

US Classification:

235380

Abstract:

The present invention provides a method and apparatus for monitoring the progress of a plurality of batches of semiconductor wafer or memory disks through a multiplicity of processing operations at various locations within a plant facility and maintaining information regarding the progress of each batch at the respective batch. The method includes the step of inserting each of the batches of wafers or memory disks in a carrier constructed and arranged for supporting the wafers or disks in parallel, axially arranged, spaced arrays. A transponder is embedded in a planar wall portion within each carrier by way of a recess extending inwardly from a lower edge of the wall portion. The transponder has a code to identify the carrier and a batch of wafers or disks contained therein and to further identify the various processing operations to which the batch has been subjected. The proximity of each carrier to various locations within the processing facility is detected by limited range read units each of which is positioned at one of the various locations and is constructed and arranged for determining the unique identification of any carrier within its detection range. Write units at various locations alter a status code in transponder to designate that a batch has been through a particular processing stage.

US Patent:

52704823, Dec 14, 1993

Filed:

May 28, 1992

Appl. No.:

7/889638

Inventors:

Robert D. Kos - Victoria MN

Assignee:

Fluoroware, Inc. - Chaska MN

International Classification:

B05C 300

US Classification:

118500

Abstract:

A process platform for wafer carriers having a floor and a handle extending upwardly from the floor to define two floor portions for engaging wafer carriers on either side of the handle. The floor portions feature structures for orienting the wafer carriers either parallel or perpendicular to the handle and a peripheral gridwork of openings to permit fluid to flow easily through the floor to the wafer carriers. The handle features openings to permit fluid flow therethrough and bifurcated portions extending between the handle and side portions of the floor to lend stiffness to the platform.

US Patent:

49498487, Aug 21, 1990

Filed:

Apr 29, 1988

Appl. No.:

7/188312

Inventors:

Robert D. Kos - Victoria MN

Assignee:

Fluoroware, Inc. - Chaska MN

International Classification:

A47G 1908

US Classification:

211 41

Abstract:

A moldable plastic, distortion and warp resistant wafer carrier having an open top for insertion and removal of wafers with opposed upright end walls. Side walls with inner opposed ribs for spacing axially aligned wafers in the carrier are provided wherein one upright end wall is H-shaped with a horizontal indexing bar extending thereacross intermediate the height of the carrier while the other upright end wall is comprised of a center panel and two side panels each oriented at an oblique angle relative to the center panel. The center panel has a planar outer surface with an upright center line and two planar inner surfaces being oriented obliquely to each other at the center line so that the center panel is thinner adjacent the center line than at outer edge portions of the center panel. A transverse outwardly extending upper flange is on each side wall. Each flange has at least two anti-warp indentations adjacent its respective ends to permit the mold to hold the wafer carrier in its originally molded shape as a wafer carrier cools in the mold thereby minimizing the warp of the wafer carrier within the mold.

US Patent:

48801160, Nov 14, 1989

Filed:

May 20, 1988

Appl. No.:

7/196734

Inventors:

Robert D. Kos - Victoria MN

Assignee:

Fluoroware, Inc. - Chaska MN

International Classification:

B65D 8548

US Classification:

206454

Abstract:

A robotic accessible wafer shipper assembly comprises a shipper base, a wafer carrier which supports the disks within the base, and a shipper cover which mates with the base and wafer carrier in latching attachment. The base, carrier and cover are provided with certain specific design features which allow them to be handled, as a completely assembled package, by its constituent components and is assembled and disassembled entirely by robotics.

US Patent:

51236818, Jun 23, 1992

Filed:

Mar 20, 1991

Appl. No.:

7/672467

Inventors:

Robert D. Kos - Victoria MN
Tracy J. Niebeling - Minneapolis MN
Shawn D. Eggum - Chaska MN

Assignee:

Fluoroware, Inc. - Chaska MN

International Classification:

E05C 1906

US Classification:

292 87

Abstract:

A silicon wafer storage box must be secured by a functional and convenient latch during the fabrication and transportation of silicon wafers. The present invention encompasses such a functional, convenient latch adaptable for either manual or automated manipulation. The invention includes a rigid upper tab having a peg adapted for interaction with a robot arm of an automated process. The invention also includes a resiliently flexible bottom bight having a horizontally extending rigid lower tab, adapted for manual manipulation. The invention permits convenient, efficient manipulation of the latch by either a person or by an automated process.

US Patent:

48177954, Apr 4, 1989

Filed:

Mar 4, 1988

Appl. No.:

7/163981

Inventors:

Robert D. Kos - Victoria MN

Assignee:

Fluoroware, Inc. - Chaska MN

International Classification:

B65D 8548

US Classification:

206328

Abstract:

A robotic accessible wafer shipper assembly comprises a shipper base, a wafer carrier which supports the disks within the base, and a shipper cover which mates with the base and wafer carrier in latching attachment. The base, carrier and cover are provided with certain specific design features which allow them to be handled, as a completely assembled package, by its constituent components and is assembled and disassembled entirely by robotics.

US Patent:

52073246, May 4, 1993

Filed:

Mar 8, 1991

Appl. No.:

7/666357

Inventors:

Robert D. Kos - Victoria MN

Assignee:

Fluoroware, Inc. - Chaska MN

International Classification:

B65D 8542

US Classification:

206334

Abstract:

A wafer cushion for a wafer shipper that has bottom cavity adapted to support a plurality of axially aligned wafer therein. The shipper further has a cover releasably interlockably with the bottom to sealably enclose the wafers within the shipper for storage or transportation. The cushion comprises a frame adapted to be supported by the cover within the wafer shipper. A plurality of aligned pairs of flexible arms depend downwardly from the frame. A plurality of cushioning segments are each individually supported by one pair of the arms and thereby are adapted to supportably engage and grip the top edge of the wafers suitably at the wafers' top centerline.

US Patent:

51543010, Oct 13, 1992

Filed:

Sep 12, 1991

Appl. No.:

7/758604

Inventors:

Robert D. Kos - Victoria MN

Assignee:

Fluoroware, Inc. - Chaska MN

International Classification:

A47G 1908

US Classification:

211 41

Abstract:

A moldable plastic, distortion and warp resistant wafer carrier with forked end wall portions that tie into the sidewalls of the carrier. The forked end wall portions from triangular column like supports between an end wall and sidewalls of the carrier such that the carrier maintains structural integrity even when its temperature fluctuates between ambient and 180. degree. C. temperatures in a relatively short time period. The structural integrity of the carrier is further enhanced by the end wall having an integrally formed bend which is disposed at a right angle relative to the forked end wall portions.