- Fremont CA, US Lin XU - Katy TX, US John Michael KERNS - Livermore CA, US William CHARLES - Los Altos CA, US John DAUGHERTY - Fremont CA, US Sivakami RAMANATHAN - Fremont CA, US Russell ORMOND - San Jose CA, US Robert G. O'NEILL - Fremont CA, US Tom STEVENSON - Morgan Hill CA, US
A method of forming a dense oxide coating on an aluminum component of semiconductor processing equipment comprises cold spraying a layer of pure aluminum on a surface of the aluminum component to a predetermined thickness. A dense oxide coating is then formed on the layer of pure aluminum using a plasma electrolytic oxidation process, wherein the plasma electrolytic oxidation process causes the layer of pure aluminum to undergo microplasmic discharges, thus forming the dense oxide coating on the layer of pure aluminum on the surface of the aluminum component.
Dense Oxide Coated Component Of A Plasma Processing Chamber And Method Of Manufacture Thereof
- Fremont CA, US Lin Xu - Katy TX, US John Michael Kerns - Livermore CA, US William Charles - Los Altos CA, US John Daugherty - Fremont CA, US Sivakami Ramanathan - Fremont CA, US Russell Ormond - San Jose CA, US Robert G. O'Neill - Fremont CA, US Tom Stevenson - Morgan Hill CA, US
Assignee:
Lam Research Corporation - Fremont CA
International Classification:
H01L 21/3065 H01L 21/02 C25D 11/02 H01L 21/67
US Classification:
438710, 428629, 428623, 428613, 438758, 427401, 118723 I, 15634548, 205190
Abstract:
A method of forming a dense oxide coating on an aluminum component of semiconductor processing equipment comprises cold spraying a layer of pure aluminum on a surface of the aluminum component to a predetermined thickness. A dense oxide coating is then formed on the layer of pure aluminum using a plasma electrolytic oxidation process, wherein the plasma electrolytic oxidation process causes the layer of pure aluminum to undergo microplasmic discharges, thus forming the dense oxide coating on the layer of pure aluminum on the surface of the aluminum component.
License Records
Robert P O'neill
License #:
EMT07029 - Active
Category:
Emergency Medical Services
Issued Date:
Sep 16, 1999
Expiration Date:
Dec 31, 2018
Type:
Emergency Medical Technician
Robert P O'neill
License #:
EMT07029 - Active
Category:
Emergency Medical Services
Issued Date:
Sep 16, 1999
Expiration Date:
Dec 31, 2018
Type:
Emergency Medical Technician
Robert William O'neill
Address:
10852 Lk Frst Dr, Conroe, TX 77384
License #:
A4200719
Category:
Airmen
Name / Title
Company / Classification
Phones & Addresses
Robert O'neill Director
The International City Management Association Retirement Corporation
Robert O'neill Director , Vice President
E & J Sewing, Inc Ret Sewing Supplies/Fabrics Business Services
Dr. O'Neill graduated from the Universidad Autu00F3noma de Guadalajara, Guadalajara, Jalisco, Mexico in 1986. He works in Hialeah, FL and specializes in Pediatrics and Adolescent Medicine. Dr. O'Neill is affiliated with Nicklaus Childrens Hospital and Palmetto General Hospital.
Southside Oral/Facial SurgerySouthside Oral Facial Surgery 595 Old Wagner Rd STE A, Petersburg, VA 23805 (804)7326532 (phone)
Southside Oral/Facial SurgerySouthside Oral & Facial Surgery 11971 Iron Brg Rd, Chester, VA 23831 (804)7326532 (phone), (804)7961415 (fax)
Southside Oral/Facial SurgerySouthside Oral & Facial Surgery 502 N 6 Ave, Hopewell, VA 23860 (804)5417837 (phone), (804)5417942 (fax)
Education:
Medical School University of Kentucky College of Medicine Graduated: 2007
Conditions:
Tempromandibular Joint Disorders (TMJ)
Languages:
English
Description:
Dr. O'neill graduated from the University of Kentucky College of Medicine in 2007. He works in Hopewell, VA and 2 other locations and specializes in Oral & Maxillofacial Surgery. Dr. O'neill is affiliated with Southside Regional Medical Center.