Robert Wynn O'Neill

US Patent:

20180127868, May 10, 2018

Filed:

Dec 15, 2017

Appl. No.:

15/843683

Inventors:

- Fremont CA, US
Hong SHIH - Walnut CA, US
Nash ANDERSON - Cupertino CA, US
Tom STEVENSON - Morgan Hill CA, US
John DAUGHERTY - Fremont CA, US
John Michael KERNS - Livermore CA, US
Robert Griffith O'NEILL - Hayward CA, US

International Classification:

C23C 14/56
C23C 16/455
C23C 16/44
C23C 16/04

Abstract:

A fluid handling component for a vacuum chamber of a semiconductor substrate processing apparatus is provided. The fluid handling component comprises interior fluid wetted surfaces and an atomic layer deposition (ALD) or molecular layer deposition (MLD) barrier coating on the interior fluid wetted surfaces wherein the fluid wetted surfaces which include the ALD or MLD barrier coating are configured to be contacted by a process gas and/or fluid during a semiconductor substrate processing process wherein the ALD or MLD barrier coating protects the underlying fluid wetted surfaces from erosion and/or corrosion.

US Patent:

20160370690, Dec 22, 2016

Filed:

Sep 2, 2016

Appl. No.:

15/256439

Inventors:

- Huntington Beach CA, US
Chong Pak - Lakewood CA, US
Joshua Cantor - Huntington Beach CA, US
Jason Patrick - Long Beach CA, US
Daniel Arato - Los Angeles CA, US
Ryan Nguyen - Fountain Valley CA, US
Robert O'Neill - Huntington Beach CA, US

International Classification:

G03B 17/56
H04N 5/225
G02B 15/10
G02B 13/00
G02B 7/02
G02B 7/14

Abstract:

A multi-lens system can be configured to be selectively attachable to a mobile electronic device having a user-facing onboard camera lens and an outward-facing onboard camera lens. The multi-lens system can attach to the mobile electronic device in at least a first position and a second position. The first lens component in the first position is configured to be in optical alignment with the user-facing onboard camera lens and simultaneously the second lens component is configured to be in optical alignment with the outward-facing onboard camera lens. The first lens component in the second position is configured to be in optical alignment with the outward-facing onboard camera lens and simultaneously the second lens component is configured to be in optical alignment with the user-facing onboard camera lens. A portable attachment accessory can be configured to be selectively attachable to a lens system that is configured to receive a portion of a mobile electronic device.

US Patent:

20160373155, Dec 22, 2016

Filed:

Jun 21, 2016

Appl. No.:

15/188764

Inventors:

- Huntington Beach CA, US
Chong Pak - Lakewood CA, US
Jason Patrick - Long Beach CA, US
Daniel Arato - Los Angeles CA, US
Joshua Cantor - Huntington Beach CA, US
Ryan Nguyen - Fountain Valley CA, US
Robert O'Neill - Huntington Beach CA, US

International Classification:

H04B 1/3888
A45C 11/00

Abstract:

Removably-attachable cases for mobile electronic devices are provided. A removably-attachable case may include an attachment region to which accessories can be attached for use with the mobile electronic device onto which the case has been installed. The accessories may include illumination components (e.g., flashes for flash photography), recording components (e.g., microphones), support components (e.g., tripods, handles), other accessories, accessory mounting components, some combination thereof, etc. A removably attachable case may also or alternatively include an access region configured to provide access to a component of a mobile electronic device onto which the case is removably attached.

US Patent:

20150370150, Dec 24, 2015

Filed:

Jun 18, 2015

Appl. No.:

14/743593

Inventors:

- Huntington Beach CA, US
Chong Pak - Lakewood CA, US
Joshua Cantor - Huntington Beach CA, US
Jason Patrick - Long Beach CA, US
Daniel Arato - Los Angeles CA, US
Ryan Nguyen - Fountain Valley CA, US
Robert O'Neill - Huntington Beach CA, US

International Classification:

G03B 17/56
G02B 7/02
H04N 5/225
G02B 13/00

Abstract:

A multi-lens system can be configured to be selectively attachable to a mobile electronic device having a user-facing onboard camera lens and an outward-facing onboard camera lens. The multi-lens system can attach to the mobile electronic device in at least a first position and a second position. The first lens component in the first position is configured to be in optical alignment with the user-facing onboard camera lens and simultaneously the second lens component is configured to be in optical alignment with the outward-facing onboard camera lens. The first lens component in the second position is configured to be in optical alignment with the outward-facing onboard camera lens and simultaneously the second lens component is configured to be in optical alignment with the user-facing onboard camera lens. A portable attachment accessory can be configured to be selectively attachable to a lens system that is configured to receive a portion of a mobile electronic device.

US Patent:

20150184296, Jul 2, 2015

Filed:

Dec 16, 2014

Appl. No.:

14/572087

Inventors:

- Fremont CA, US
Hong Shih - Walnut CA, US
Nash Anderson - Cupertino CA, US
Tom Stevenson - Morgan Hill CA, US
John Daugherty - Fremont CA, US
John Michael Kerns - Livermore CA, US
Robert Griffith O'Neill - Hayward CA, US

International Classification:

C23C 16/455
C23C 16/46
H01L 21/67
C23C 16/52

Abstract:

A coating system for forming an atomic layer deposition (ALD) or a molecular layer deposition (MLD) barrier coating on interior fluid wetted surfaces of a fluid handling component for a vacuum chamber of a semiconductor substrate processing apparatus. The coating system includes the fluid handling component, wherein the interior fluid wetted surfaces define a process region of the coating system, a gas supply system in fluid communication with the process region of the component wherein the gas supply system supplies process gases to the process region of the component through the inlet port thereof such that an ALD or MLD barrier coating can be formed on the fluid wetted surfaces of the fluid handling component, and an exhaust system in fluid communication with the process region of the component wherein the exhaust system exhausts the process gases from the process region of the component through the outlet port thereof.

US Patent:

20150187615, Jul 2, 2015

Filed:

Dec 22, 2014

Appl. No.:

14/578979

Inventors:

- Fremont CA, US
Hong Shih - Walnut CA, US
Anthony Amadio - San Mateo CA, US
Tom Stevenson - Morgan Hill CA, US
Lin Xu - Katy TX, US
John Michael Kerns - Livermore CA, US
Robert Griffith O'Neill - Hayward CA, US
Sonia Castillo - Hayward CA, US

International Classification:

H01L 21/67
H01L 21/02
C25D 11/02
H01L 21/3065
C23C 24/04
C23C 22/73

Abstract:

A semiconductor plasma processing apparatus used to process semiconductor components comprises a plasma processing chamber, a process gas source in fluid communication with the plasma processing chamber for supplying a process gas into the plasma processing chamber, a RF energy source adapted to energize the process gas into the plasma state in the plasma processing chamber, and a vacuum port for exhausting process gas from the plasma processing chamber. The semiconductor plasma processing apparatus further comprises at least one component wherein the component has a body which has a relative magnetic permeability of about 70,000 or greater and a cold sprayed electrically conductive and nonmagnetic coating on a surface of the body wherein the coating has a thickness greater than the skin depth of a RF current configured to flow therethrough during plasma processing.

US Patent:

20140272459, Sep 18, 2014

Filed:

Mar 12, 2013

Appl. No.:

13/796751

Inventors:

- Fremont CA, US
Hong Shih - Walnut CA, US
Lin Xu - Katy TX, US
Anthony Amadio - Mountain View CA, US
Robert G. O'Neill - Fremont CA, US
Peter Holland - Pleasanton CA, US
Sivakami Ramanathan - Fremont CA, US
Tae Won Kim - Dublin CA, US
Duane Outka - Fremont CA, US
John Michael Kerns - Livermore CA, US
Sonia Castillo - Hayward CA, US

Assignee:

LAM RESEARCH CORPORATION - Fremont CA

International Classification:

H01J 37/32
H01L 21/3065
H01L 21/02
C22C 21/00
C23C 4/12

US Classification:

428654, 428457, 4284722, 428332, 428141, 428 666, 428213, 428215, 134 12, 205190, 420530, 427456, 438758, 438710

Abstract:

Components of semiconductor material processing chambers are disclosed, which may include a substrate and at least one corrosion-resistant coating formed on a surface thereof. The at least one corrosion-resistant coating is a high purity metal coating formed by a cold-spray technique. An anodized layer can be formed on the high purity metal coating. The anodized layer comprises a process-exposed surface of the component. Semiconductor material processing apparatuses including one or more of the components are also disclosed, the components being selected from the group consisting of a chamber liner, an electrostatic chuck, a focus ring, a chamber wall, an edge ring, a plasma confinement ring, a substrate support, a baffle, a gas distribution plate, a gas distribution ring, a gas nozzle, a heating element, a plasma screen, a transport mechanism, a gas supply system, a lift mechanism, a load lock, a door mechanism, a robotic arm and a fastener. Methods of making the components and methods of plasma processing using the components are also disclosed.