Abstract:
An improved spatial light modulator package comprising a spatial light modulator attached to a central region of a substrate , a sealing ring on said substrate around the central region thereof, a window frame attached to the sealing ring , and a window glued to the window frame. Gluing the window to the window frame avoids distortion of the glass that occurs when the window is heat bonded to the window frame, and avoids having to grind and polish the glass window after it is bonded to the window frame.