Ronald Wayne Roberts

Address:

2905 Dresden Cv, Austin, TX 78723

VIN:

KL1TD56688B042479

Make:

CHEVROLET

Model:

AVEO

Year:

2008

US Patent:

61216240, Sep 19, 2000

Filed:

Aug 24, 1998

Appl. No.:

9/138741

Inventors:

Frederick A. Stevie - Orlando FL
Ronald F. Roberts - Orlando FL
Mark A. Decker - Winter Park FL

Assignee:

Lucent Technologies, Inc. - Murray Hill NJ

International Classification:

H01L 2166
H01L 21265
H01J 4904

US Classification:

25049221

Abstract:

A method for introducing a known concentration of at least one species of ions into the surface or near surface of a substrate can be employed as a calibration technique prior to subsequent surface or near surface measurement. The method involves the introduction of a removable layer onto the surface followed by ion implantation which is performed to provide a known concentration of implanted ion at the interface between the removable layer and the surface. Subsequent to removal of the removable layer, the surface can be subjected to determination of elemental concentrations at the surface or near surface levels by techniques such as total reflection x-ray fluorescence or secondary ion mass spectrometry.