Ronald Lee Rose

US Patent:

6379466, Apr 30, 2002

Filed:

May 5, 1994

Appl. No.:

08/238598

Inventors:

Turgut Sahin - Cupertino CA
Salvador Umotoy - Antioch CA
Avi Tepman - Cupertino CA
Ronald Lloyd Rose - Los Gatos CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118724, 118715, 20429809, 165168, 165169, 165 804

Abstract:

The temperature controlled gas distribution plate of the present invention includes a liquid cooling passage, with inlet and outlet ports, that is formed within the gas distribution plate. In the preferred embodiment, the plate is formed with an upper passage cover and a lower base having a liquid passage channel formed within the side walls thereof. The cover and base are welded together to form a sealed liquid passage within the plate through which the liquid coolant flows.

US Patent:

7897525, Mar 1, 2011

Filed:

Dec 31, 2008

Appl. No.:

12/319231

Inventors:

Lawrence Chung-Lai Lei - Milpitas CA, US
Alfred Mak - Fremont CA, US
Rex Liu - Castro Valley CA, US
Kon Park - Livermore CA, US
Samuel S. Pak - San Ramon CA, US
Tzy-Chung Terry Wu - Palo Alto CA, US
Simon Zhu - Sunnyvale CA, US
Ronald L. Rose - San Jose CA, US
Gene Shin - San Jose CA, US
Xiaoming Wang - San Jose CA, US

Assignee:

Archers Inc. - Gerogetown, Grand Cayman

International Classification:

H01L 21/00

US Classification:

438800, 414935

Abstract:

In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.

US Patent:

8268734, Sep 18, 2012

Filed:

Mar 1, 2011

Appl. No.:

13/038309

Inventors:

Lawrence Chung-Lai Lei - Milpitas CA, US
Alfred Mak - Fremont CA, US
Rex Liu - Castro Valley CA, US
Kon Park - Livermore CA, US
Samuel S. Pak - San Ramon CA, US
Tzy-Chung Terry Wu - Palo Alto CA, US
Simon Zhu - Sunnyvale CA, US
Ronald L. Rose - San Jose CA, US
Gene Shin - San Jose CA, US
Xiaoming Wang - San Jose CA, US

Assignee:

Archers Inc. - Georgetown

International Classification:

H01L 21/00

US Classification:

438800, 414935

Abstract:

In accordance with some embodiments described herein, a method for transferring a substrate to two or more process modules is provided, comprising loading at least one substrate into one or more mobile transverse chambers, the mobile transverse chambers being carried on a rail positioned adjacent to the two or more process modules, and wherein each mobile transverse chamber is configured to maintain a specified gas condition during conveyance of the substrate. One or more drive systems are actuated to propel at least one of the one or more mobile transverse chambers along the rail. The at least one mobile transfer chamber docks to at least one of the process modules, and the substrate is conveyed from the mobile transverse chamber to the at least one process modules.

US Patent:

8367565, Feb 5, 2013

Filed:

Dec 20, 2010

Appl. No.:

12/973736

Inventors:

Lawrence Chung-Lai Lei - Milpitas CA, US
Alfred Mak - Fremont CA, US
Rex Liu - Castro Valley CA, US
Kon Park - Livermore CA, US
Samuel S. Pak - San Ramon CA, US
Tzy-Chung Terry Wu - Palo Alto CA, US
Simon Zhu - Sunnyvale CA, US
Ronald L. Rose - San Jose CA, US
Gene Shin - San Jose CA, US
Xiaoming Wang - San Jose CA, US

Assignee:

Archers Inc. - Georgetown

International Classification:

H01L 21/00

US Classification:

438800, 414935

Abstract:

In accordance with some embodiments described herein, a method for transferring a substrate is provided. The method includes loading one or more substrates into a respective mobile chamber of one or more mobile chambers. The mobile chambers are movable on a first rail positioned adjacent to two or more process modules. Each mobile chamber is configured to maintain a specified gas condition. The respective mobile chamber is moved along the first rail. The respective mobile chamber is docked to a respective process module of the two or more process modules. At least one of the one or more substrates is conveyed from the respective mobile chamber to the respective process module.

US Patent:

20010042513, Nov 22, 2001

Filed:

Jul 27, 2001

Appl. No.:

09/916967

Inventors:

Kenneth Tsai - Redwood City CA, US
Quyen Pham - Union City CA, US
Ronald Rose - Los Gatos CA, US
Calvin Augason - Los Altos CA, US
Joseph Yudovsky - Palo Alto CA, US

International Classification:

H01L021/00

US Classification:

118/7230MR, 156/345000

Abstract:

An apparatus and methods for an upgraded CVD system providing a remote plasma for efficiently cleaning a chamber, according to a specific embodiment. Etching or depositing a layer onto a substrate also may be achieved using the upgraded CVD system of the present invention. In a specific embodiment, the present invention provides apparatus for an easily removable, conveniently handled, and relatively inexpensive, robust microwave plasma source as a retrofit for or a removable addition to existing CVD apparatus. The present invention provides an improved CVD apparatus or retrofit of existing CVD apparatus capable of producing a remote plasma for efficiently cleaning the chamber.

US Patent:

20100162954, Jul 1, 2010

Filed:

Dec 31, 2008

Appl. No.:

12/319224

Inventors:

Lawrence Chung-Lai Lei - Milpitas CA, US
Alfred Mak - Fremont CA, US
Rex Liu - Castro Valley CA, US
Kon Park - Livermore CA, US
Tzy-Chung Terry Wu - Palo Alto CA, US
Ronald L. Rose - San Jose CA, US

International Classification:

C23C 16/00

US Classification:

118723 R, 118715

Abstract:

In accordance with some embodiments described herein, a process module facility is provided, comprising: at least one process chamber carried in frame, a subfloor adjacent the process module, a stationary pump and electrical box positioned atop the subfloor; and gas control lines and vacuum exhaust lines housed within the subfloor and coupled the process chamber. The process module facility may be integrated with a larger system for processing substrates which includes two or more process module facilities, a substrate handling robot, a load lock chamber, and a transverse substrate handler. The transverse substrate handler includes mobile transverse chambers configured to convey substrates to process modules, wherein each mobile transverse chamber is configured to maintain a specified gas condition during the conveyance of the substrates. The transverse substrate handler further includes a rail for supporting the mobile transverse chambers, wherein the rail is positioned adjacent to entry of the process modules, and drive systems for moving the mobile transverse chambers on the rail.

US Patent:

47691476, Sep 6, 1988

Filed:

Nov 21, 1985

Appl. No.:

6/800208

Inventors:

William L. Lawrence - Louisville KY
Robert D. Coyle - Louisville KY
Ronald G. Rose - New Castle KY

Assignee:

Opcon Inc. - Louisville KY

International Classification:

B01D 3530

US Classification:

210350

Abstract:

Method and apparatus for purification of liquids, particularly hydrophobic oil-water emulsions which includes heating the emulsified liquid to a process temperature where accelerated stratification occurs and passing the fluid through a fiberous media which is maintained at a selected compressed condition which allows flow through the media to separate the oil and water phases. Additionally, within the scope of the present invention organic fluids containing significant amounts of water can be heated utilizing a vacuum in order to reduce the water content to the range of 0 to as much as 8% prior to passage through the media at the process temperature.

US Patent:

55229379, Jun 4, 1996

Filed:

May 3, 1994

Appl. No.:

8/237084

Inventors:

Sandy M. Chew - San Jose CA
Dale R. DuBois - Los Gatos CA
Ronald L. Rose - Los Gatos CA
Manus Wong - San Jose CA

Assignee:

Applied Materials, Inc. - Santa Clara CA

International Classification:

C23C 1600

US Classification:

118728

Abstract:

A susceptor support arm assembly in a substrate processing chamber includes a secure ground connection between the susceptor and ground. An aluminum wire rope is welded to a winged terminal lug which is tightly inserted into a hole in a susceptor hub. The wings of the lug are then welded to the hub. The wire rope, now permanently attached to the susceptor hub, is routed through an opening in the susceptor end of a ceramic susceptor support arm, able to pass the ground end lug of the wire rope, through a channel in the support arm back to the susceptor arm support device, and to ground. The channel in the susceptor arm has grooves in its sides to receive a paddle shaped ceramic cover to enclose the channel and the bottom of the hub end of the susceptor arm. The cover insulates, isolates, and shields the grounding wire and thermocouple leads being routed from the susceptor hub back to the support end of the susceptor arm from exposure to the high intensity radiant energy directed at the back of the susceptor. Conical spring washers and shoulder screws, attach the metallic pieces (e. g.

Address:

2309 Crown Pl, Abilene, TX 79606

VIN:

5N1AN08U67C529759

Make:

NISSAN

Model:

XTERRA

Year:

2007